Characterization of Ar{sup +} sputtering effects in a single-crystal CdTe by AES and XPS
Conference
·
OSTI ID:258306
- National Renewable Energy Lab., Golden, CO (United States)
Single crystal CdTe samples were sputtered with 0.5-4.0 keV Ar{sup +} beams and characterized using AES and XPS. Quantities determined in this study include the degree of preferential sputtering of Cd for different sputtering conditions and the sputter rate of CdTe under these conditions. Depth profiles as a function of ion dose for different ion energies are compared to show beam effects during sputtering. Results from these experiments show no significant change in the relative sputter yields of Cd and Te as a function of ion energy. Observed differences in results obtained with XPS and AES are discussed.
- OSTI ID:
- 258306
- Report Number(s):
- CONF-9506225--
- Country of Publication:
- United States
- Language:
- English
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