Reactive ion etching of epitaxial ZnSe thin films
Journal Article
·
· J. Vac. Sci. Technol., B; (United States)
Using mixtures of boron trichloride and argon, we show it is possible to reactive ion etch epitaxial thin films of ZnSe grown on GaAs. Optimum etching conditions were determined by the application of a model generated from the multiple linear regression of the independent variables affecting the etching process. These variables included the power, pressure, gas composition, and time of etch. Optimum etching conditions produced etched structures with straight sidewalls and smooth surfaces. Photolithographically defined structures included both micrometer sized stripes and pixel arrays. Cathodoluminescence was measured from the surfaces of these etched structures and from the surface of unetched material at room temperature. Luminescence intensities of broad flat etched surfaces are shown not to be degraded by the etching process. This suggests the possibility of efficient etched light emitting structures.
- Research Organization:
- Bell Communications Research, Red Bank, New Jersey 07701
- OSTI ID:
- 6690905
- Journal Information:
- J. Vac. Sci. Technol., B; (United States), Journal Name: J. Vac. Sci. Technol., B; (United States) Vol. 6:6; ISSN JVTBD
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
656003* -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ARGON IONS
BORON CHLORIDES
BORON COMPOUNDS
CATHODOLUMINESCENCE
CHALCOGENIDES
CHARGED PARTICLES
CHEMICAL REACTIONS
CHLORIDES
CHLORINE COMPOUNDS
COLLISIONS
DAMAGE
ELECTRONIC CIRCUITS
ETCHING
FABRICATION
FILMS
HALIDES
HALOGEN COMPOUNDS
INTEGRATED CIRCUITS
ION COLLISIONS
IONS
LUMINESCENCE
MICROELECTRONIC CIRCUITS
MOLECULAR IONS
OPTIMIZATION
SELENIDES
SELENIUM COMPOUNDS
SURFACE FINISHING
THIN FILMS
ZINC COMPOUNDS
ZINC SELENIDES
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ARGON IONS
BORON CHLORIDES
BORON COMPOUNDS
CATHODOLUMINESCENCE
CHALCOGENIDES
CHARGED PARTICLES
CHEMICAL REACTIONS
CHLORIDES
CHLORINE COMPOUNDS
COLLISIONS
DAMAGE
ELECTRONIC CIRCUITS
ETCHING
FABRICATION
FILMS
HALIDES
HALOGEN COMPOUNDS
INTEGRATED CIRCUITS
ION COLLISIONS
IONS
LUMINESCENCE
MICROELECTRONIC CIRCUITS
MOLECULAR IONS
OPTIMIZATION
SELENIDES
SELENIUM COMPOUNDS
SURFACE FINISHING
THIN FILMS
ZINC COMPOUNDS
ZINC SELENIDES