Disilane versus monosilane: a comparison of the properties of glow-discharge a-Si:H films and solar cells
Conference
·
OSTI ID:6669281
The consequences of using disilane instead of silane for the glow-discharge deposition of a-Si:H solar cells have been studied. Deposition rates were increased fivefold by the use of disilane. The a-Si:H films have a higher hydrogen content, but otherwise are quite similar to silane produced films and possess the same type of gap states. Chlorosilanes, HCl, and oxysilanes were detected in the disilane by mass spectrometry and their influence on film and solar cell properties assessed. The problem of inadvertent dopant tails resulting from the higher deposition rate of the solar cells is identified.
- Research Organization:
- Chronar Corp., Princeton, NJ (USA); Brookhaven National Lab., Upton, NY (USA); Army Research Office, Research Triangle Park, NC (USA)
- DOE Contract Number:
- AC02-76CH00016
- OSTI ID:
- 6669281
- Report Number(s):
- BNL-32046; CONF-820906-36; ON: DE83002841
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
AMORPHOUS STATE
CURRENT DENSITY
DATA
DIRECT ENERGY CONVERTERS
EFFICIENCY
ELECTRIC CONDUCTIVITY
ELECTRIC DISCHARGES
ELECTRIC POTENTIAL
ELECTRICAL PROPERTIES
ELEMENTS
EMISSION SPECTRA
ENERGY-LEVEL DENSITY
EQUIPMENT
EXPERIMENTAL DATA
FILMS
GLOW DISCHARGES
HYDRIDES
HYDROGEN COMPOUNDS
IMPURITIES
INFORMATION
MASS SPECTROSCOPY
NUMERICAL DATA
PHOTOCONDUCTIVITY
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
QUANTUM EFFICIENCY
SEMIMETALS
SILANES
SILICON
SILICON COMPOUNDS
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SPECTRA
SPECTRAL RESPONSE
SPECTROSCOPY
TEMPERATURE DEPENDENCE
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
AMORPHOUS STATE
CURRENT DENSITY
DATA
DIRECT ENERGY CONVERTERS
EFFICIENCY
ELECTRIC CONDUCTIVITY
ELECTRIC DISCHARGES
ELECTRIC POTENTIAL
ELECTRICAL PROPERTIES
ELEMENTS
EMISSION SPECTRA
ENERGY-LEVEL DENSITY
EQUIPMENT
EXPERIMENTAL DATA
FILMS
GLOW DISCHARGES
HYDRIDES
HYDROGEN COMPOUNDS
IMPURITIES
INFORMATION
MASS SPECTROSCOPY
NUMERICAL DATA
PHOTOCONDUCTIVITY
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
QUANTUM EFFICIENCY
SEMIMETALS
SILANES
SILICON
SILICON COMPOUNDS
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SPECTRA
SPECTRAL RESPONSE
SPECTROSCOPY
TEMPERATURE DEPENDENCE