Disilane versus monosilane: a comparison of the properties of glow-discharge a-Si:H Films and solar cells
Conference
·
· Conf. Rec. IEEE Photovoltaic Spec. Conf.; (United States)
OSTI ID:5426542
The consequences of using disilane instead of silane for the glow-discharge deposition of a-Si:H solar cells have been studied. Deposition rates were increased fivefold by the use of disilane. The a-Si:H films have a higher hydrogen content, but otherwise are quite similar to silane produced films and possess the same type of gap states. Chlorosilanes, HCl, and oxysilanes were detected in the disilane by mass spectrometry and their influence on film and solar cell properties assessed. The problem of inadvertent dopant tails resulting from the higher deposition rate of the solar cells is identified.
- Research Organization:
- Chronar Corp., Princeton, NJ
- DOE Contract Number:
- AC02-76CH00016
- OSTI ID:
- 5426542
- Report Number(s):
- CONF-820906-
- Conference Information:
- Journal Name: Conf. Rec. IEEE Photovoltaic Spec. Conf.; (United States)
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
AMORPHOUS STATE
CHLORINE COMPOUNDS
COMPARATIVE EVALUATIONS
CONVERSION
CRYSTAL DOPING
DEPOSITION
DIRECT ENERGY CONVERSION
DIRECT ENERGY CONVERTERS
EFFICIENCY
ELECTRIC DISCHARGES
ENERGY CONVERSION
EQUIPMENT
GLOW DISCHARGES
GRADED BAND GAPS
HALOGEN COMPOUNDS
HYDRIDES
HYDROCHLORIC ACID
HYDROGEN ADDITIONS
HYDROGEN COMPOUNDS
INORGANIC ACIDS
MASS SPECTRA
OXYGEN COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHOTOVOLTAIC CONVERSION
QUANTUM EFFICIENCY
SILANES
SILICON COMPOUNDS
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SPECTRA
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
AMORPHOUS STATE
CHLORINE COMPOUNDS
COMPARATIVE EVALUATIONS
CONVERSION
CRYSTAL DOPING
DEPOSITION
DIRECT ENERGY CONVERSION
DIRECT ENERGY CONVERTERS
EFFICIENCY
ELECTRIC DISCHARGES
ENERGY CONVERSION
EQUIPMENT
GLOW DISCHARGES
GRADED BAND GAPS
HALOGEN COMPOUNDS
HYDRIDES
HYDROCHLORIC ACID
HYDROGEN ADDITIONS
HYDROGEN COMPOUNDS
INORGANIC ACIDS
MASS SPECTRA
OXYGEN COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHOTOVOLTAIC CONVERSION
QUANTUM EFFICIENCY
SILANES
SILICON COMPOUNDS
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SPECTRA