The measurement and analysis of epitaxial recrystallization kinetics in ion-beam-amorphized SrTiO[sub 3]
- Division of Engineering, Brown University, Providence, Rhode Island 02912 (United States)
- Solid State Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6056 (United States)
The solid-state epitaxial-regrowth kinetics of ion-beam amorphized SrTiO[sub 3] surfaces annealed in water-vapor-rich atmospheres have been studied using time-resolved reflectivity (TRR). For this material, the conversion of the reflectivity-versus-time data obtained from the TRR measurements to recrystallized depth-versus-time data is more complicated than in systems such as silicon, where the reflectivity can be fit by assuming that the refractive index [ital N] ([ital N]=[ital n]+i[ital k]) in the amorphous layer is constant. In SrTiO[sub 3], agreement between measurements made directly with Rutherford backscattering spectroscopy (RBS) and those made using TRR can be obtained only when [ital N] is permitted to vary within the amorphous layer, with non-zero values for both the real and imaginary components. In some cases, the roughness of the amorphous/crystalline interface must also be considered. Additionally, a model for H[sub 2]O-enhanced epitaxial regrowth is presented which is in good agreement with the shape of the depth-versus-time profiles that are obtained from the TRR data.
- DOE Contract Number:
- AC05-84OR21400
- OSTI ID:
- 6663546
- Journal Information:
- Journal of Materials Research; (United States), Vol. 9:12; ISSN 0884-2914
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
STRONTIUM TITANATES
RECRYSTALLIZATION
AMORPHOUS STATE
EPITAXY
ION BEAMS
KINETICS
MATHEMATICAL MODELS
REFLECTIVITY
SURFACES
TIME RESOLUTION
ALKALINE EARTH METAL COMPOUNDS
BEAMS
OPTICAL PROPERTIES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RESOLUTION
STRONTIUM COMPOUNDS
SURFACE PROPERTIES
TIMING PROPERTIES
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
360202* - Ceramics
Cermets
& Refractories- Structure & Phase Studies