The effect of annealing environments on the epitaxial recrystallization of ion-beam-amorphized SrTiO sub 3

Journal Article · Sun Mar 01 04:00:00 EST 1992 · Journal of Materials Research; (United States)

DOI:https://doi.org/10.1557/JMR.1992.0717· OSTI ID:7034783

Rankin, J; McCallum, J C; Boatner, L A ^[1]

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1. Solid State Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831 (United States)

Time-resolved reflectivity and Rutherford backscattering spectroscopy were used to investigate the effects of regrowth environments on the thermally induced solid phase epitaxial (SPE) regrowth of amorphous near-surface layers produced by ion implantation of single-crystal SrTiO{sub 3}. Water vapor in the regrowth atmosphere was found to alter both the apparent rate and activation energy of the SPE regrowth. For relatively dry atmospheres, a single constant regrowth rate is observed at any given temperature, and the activation energy is 1.2{plus minus}0.1 eV. When the concentration of H{sub 2}O vapor in the atmosphere is increased, however, the regrowth activation energy effectively decreases to {similar to}0.95 eV. When regrown in atmospheres containing H{sub 2}O vapor, the SrTiO{sub 3} amorphous layer exhibits two distinct stages of SPE regrowth as compared to the single rate found for dry anneals. This two-stage process apparently results from the diffusion of H/OH from the regrowth atmosphere at the surface of the crystal through the amorphous layer to the regrowing crystalline/amorphous interface.

• DOE Contract Number: AC05-84OR21400
• OSTI ID: 7034783
• Journal Information: Journal of Materials Research; (United States), Journal Name: Journal of Materials Research; (United States) Vol. 7:3; ISSN JMREE; ISSN 0884-2914
• Country of Publication: United States
• Language: English

Related Subjects

665000* -- Physics of Condensed Matter-- (1992-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
COLLISIONS
CRYSTALS
ELASTIC SCATTERING
EPITAXY
HEAT TREATMENTS
ION COLLISIONS
MONOCRYSTALS
OPTICAL PROPERTIES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RECRYSTALLIZATION
REFLECTIVITY
RUTHERFORD SCATTERING
SCATTERING
STRONTIUM COMPOUNDS
STRONTIUM TITANATES
SURFACE PROPERTIES
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS