Time resolved reflectivity measurements in Pb-implanted SrTiO/sub 3/

Conference · Thu Jun 01 04:00:00 EDT 1989

OSTI ID:5777817

McCallum, J C; Rankin, J; White, C W; Boatner, L A

Time resolved optical reflectivity (TRR) is a simple and elegant technique for dynamically monitoring the interface motion that occurs during crystallization of thin films and amorphous layers on crystalline substrates. This in situ technique has enabled measurements of the solid-phase epitaxial regrowth rate of amorphous silicon layers produced by ion implantation to be extended by over five orders of magnitude to rates in excess of 10/sup 6/ /angstrom//s. TRR is also well suited to measurements of crystallization kinetics in ion-implanted ceramic oxides. In the present work, the technique is used to directly monitor the regrowth during thermal annealing of amorphous layers produced by ion implantation in the crystalline ceramic oxide SrTiO/sub 3/. In particular, the effect of ambient water vapour on the epitaxial regrowth rate of amorphous layers in these materials has been examined. This study provides new insight into the role of water in regrowth of materials of this nature and clearly illustrates the utility of TRR in measurements of crystallization rates in ceramic oxides. 11 refs., 5 figs.

• Research Organization: Oak Ridge National Lab., TN (USA)
• DOE Contract Number: AC05-84OR21400
• OSTI ID: 5777817
• Report Number(s): CONF-8906155-4; ON: DE89016234
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
ALKALINE EARTH METAL COMPOUNDS
AMORPHOUS STATE
CHALCOGENIDES
CHARGED PARTICLES
ELEMENTS
FILMS
ION IMPLANTATION
IONS
LEAD IONS
NITROGEN
NONMETALS
OPTICAL PROPERTIES
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RECRYSTALLIZATION
REFLECTIVITY
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
SURFACE PROPERTIES
TEMPERATURE DEPENDENCE
THIN FILMS
TITANIUM COMPOUNDS
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS