Effect of noble gases on the properties of ion beam sputtered niobium films
Journal Article
·
· J. Vac. Sci. Technol., A; (United States)
We present result to support our hypothesis that the reflection of the primary beam during ion-beam sputtering of niobium films plays a significant role in determining final film properties, especially in the case of ion-beam sputtering. The film properties are afected by both the noble gas incorporation in and noble-gas bombardment of the growing film. (AIP)
- Research Organization:
- Massachusetts Institute of Technology--Lincoln Laboratory, Lexington, Massachusetts 02173 and Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139
- OSTI ID:
- 6571578
- Journal Information:
- J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 7:1; ISSN JVTAD
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
656003* -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ARGON IONS
CHARGED PARTICLES
COLLISIONS
DAMAGE
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELEMENTS
ENERGY RANGE
FILMS
IMPURITIES
ION COLLISIONS
IONS
KEV RANGE
KEV RANGE 01-10
KRYPTON IONS
METALS
NIOBIUM
PHYSICAL PROPERTIES
SPUTTERING
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
THERMODYNAMIC PROPERTIES
THIN FILMS
TRANSITION ELEMENTS
TRANSITION TEMPERATURE
XENON IONS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ARGON IONS
CHARGED PARTICLES
COLLISIONS
DAMAGE
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELEMENTS
ENERGY RANGE
FILMS
IMPURITIES
ION COLLISIONS
IONS
KEV RANGE
KEV RANGE 01-10
KRYPTON IONS
METALS
NIOBIUM
PHYSICAL PROPERTIES
SPUTTERING
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
THERMODYNAMIC PROPERTIES
THIN FILMS
TRANSITION ELEMENTS
TRANSITION TEMPERATURE
XENON IONS