Superconducting properties of niobium films subjected to ion-beam sputtering

Journal Article · Tue Apr 01 04:00:00 EST 1980 · Sov. Phys. - Solid State (Engl. Transl.); (United States)

OSTI ID:5053417

Kravchenko, V V; Markus, A I; Krivobok, V V; Velichko, N I; Udovenko, V F; Bondarenko, S I; Sal'tevskii, G I

A study was made of the influnce of etching by a beam of 45 keV Ar/sup +/ ions on Nb films of initial thickness 600--2000 A. The sputtering coefficient and the depth of penetration of ions were determined. The changes in the resistance and the superconducting characteristics of niobium indicated formation of defects in the films.(AIP)

• Research Organization: Physicotechnical Institute of Low Temperatures, Academy of Sciences of the Ukrainian SSR, Kharkov
• OSTI ID: 5053417
• Journal Information: Sov. Phys. - Solid State (Engl. Transl.); (United States), Journal Name: Sov. Phys. - Solid State (Engl. Transl.); (United States) Vol. 22:4; ISSN SPSSA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360104 -- Metals & Alloys-- Physical Properties
360106* -- Metals & Alloys-- Radiation Effects
640301 -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
656102 -- Solid State Physics-- Superconductivity-- Acoustic
Electronic
Magnetic
Optical
& Thermal Phenomena-- (-1987)
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ARGON IONS
CHARGED PARTICLES
COLLISIONS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELEMENTS
ENERGY RANGE
FILMS
IONS
KEV RANGE
KEV RANGE 10-100
METALS
NIOBIUM
PHYSICAL PROPERTIES
PHYSICAL RADIATION EFFECTS
RADIATION EFFECTS
REFRACTORY METALS
SPUTTERING
SUPERCONDUCTIVITY
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENTS
TRANSITION TEMPERATURE