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Influence of implantation of Ar/sup +/ and O/sup +//sub 2/ ions on superconducting properties of niobium films

Journal Article · · Sov. Phys. - Solid State (Engl. Transl.); (United States)
OSTI ID:5484207
Ions of energy 70--80 keV were implanted at room temperature. The results indicated that the implantation of O/sup +//sub 2/ had a much stronger influence on the superconducting properties of niobium films than did the implantation of Ar/sup +/. This was attributed to the high chemical activity of oxygen. (AIP)
Research Organization:
V. I. Ulyanov (Lenin) Institute of Electrical Engineering, Leningrad
OSTI ID:
5484207
Journal Information:
Sov. Phys. - Solid State (Engl. Transl.); (United States), Journal Name: Sov. Phys. - Solid State (Engl. Transl.); (United States) Vol. 23:9; ISSN SPSSA
Country of Publication:
United States
Language:
English