Superconducting YBaCuO thin films by Cu-ion implantation

Journal Article · Fri Feb 15 04:00:00 EST 1991 · Journal of Applied Physics; (USA)

DOI:https://doi.org/10.1063/1.348692· OSTI ID:5979633

Hubbard, K M; Bordes, N; Nastasi, M; Tesmer, J R ^[1]

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1. Los Alamos National Laboratory, Los Alamos, New Mexico 87545 (US)

We have investigated the fabrication of thin-film superconductors by Cu-ion implantation into initially Cu-deficient Y(BaF{sub 2})Cu thin films. The precursor films were co-evaporated on SrTiO{sub 3} substrates, and subsequently implanted to various doses with 400 keV {sup 63}Cu{sup 2+}. Implantations were performed at both LN{sub 2} temperature, and at 380 {degree}C. The films were post-annealed in oxygen, and characterized as a function of dose by four-point probe analysis, x-ray diffraction, ion-beam backscattering and channeling, and scanning electron microscopy. It was found that a significant improvement in film quality could be achieved by heating the films to 380 {degree}C during the implantation. The best films made became fully superconducting at 60--70 K, and exhibited good metallic {ital R} vs {ital T} behavior in the normal state.

• OSTI ID: 5979633
• Journal Information: Journal of Applied Physics; (USA), Journal Name: Journal of Applied Physics; (USA) Vol. 69:4; ISSN 0021-8979; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHANNELING
COHERENT SCATTERING
COPPER COMPOUNDS
COPPER OXIDES
DIFFRACTION
ELECTRON MICROSCOPY
HEAT TREATMENTS
HIGH-TC SUPERCONDUCTORS
ION CHANNELING
ION IMPLANTATION
MICROSCOPY
OXIDES
OXYGEN COMPOUNDS
SCANNING ELECTRON MICROSCOPY
SCATTERING
SUPERCONDUCTORS
TRANSITION ELEMENT COMPOUNDS
X-RAY DIFFRACTION
YTTRIUM COMPOUNDS
YTTRIUM OXIDES