Spectral characteristics of plasma emission during ArF excimer laser ablation of YBa/sub 2/Cu/sub 3/O/sub 7/

Journal Article · Sun Jan 29 23:00:00 EST 1989 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.101555· OSTI ID:6566000

Geyer, T J; Weimer, W A

In order to characterize the laser ablation process as it relates to the deposition of high T/sub c/ superconducting thin films, optical emission spectra produced during ArF excimer laser ablation of the high T/sub c/ superconductor YBa/sub 2/Cu/sub 3/O/sub 7/ were studied. The population of excited states within the gas phase blow-off material depends strongly on excimer laser fluence at 193 nm. Ablation using relatively low excimer laser fluences produces a significant fraction of YO in the gas phase. The plasmas derived from ablation of targets made from the high T/sub c/ material are similar to plasmas observed from ablation of the individual components BaCO/sub 3/, CuO, and Y/sub 2/O/sub 3/.

• Research Organization: Chemistry Division, Research Department, Naval Weapons Center, China Lake, California 93555
• OSTI ID: 6566000
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 54:5; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
ABLATION
ALKALINE EARTH METAL COMPOUNDS
ARGON COMPOUNDS
ARGON FLUORIDES
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
DEPOSITION
ELECTROMAGNETIC RADIATION
EXCIMER LASERS
FABRICATION
FILMS
FLUORIDES
FLUORINE COMPOUNDS
GAS LASERS
HALIDES
HALOGEN COMPOUNDS
LASERS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RADIATIONS
RARE GAS COMPOUNDS
SUPERCONDUCTING FILMS
SURFACE COATING
THERMODYNAMIC PROPERTIES
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
VISIBLE RADIATION
YTTRIUM COMPOUNDS
YTTRIUM OXIDES