Plasma emission from laser ablation of the high-temperature superconductor YBa/sub 2/Cu/sub 3/O/sub 7/

Journal Article · Mon Jun 20 00:00:00 EDT 1988 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.99759· OSTI ID:5256155

Weimer, W A

Emission spectra generated during the excimer laser ablation of the high-temperature superconductor YBa/sub 2/Cu/sub 3/O/sub 7/ at 193 nm are presented. The feasibility of using this emission as a signal source for a thin-film deposition process monitor is discussed. Results indicate the formation of a partially ionized plasma above the target surface.

• Research Organization: Chemistry Division, Naval Weapons Center, China Lake, California 93555
• OSTI ID: 5256155
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 52:25; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
ABLATION
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHARGED PARTICLES
COPPER COMPOUNDS
COPPER OXIDES
DATA
DEPOSITION
ELECTROMAGNETIC RADIATION
EMISSION SPECTRA
EXPERIMENTAL DATA
FILMS
INFORMATION
IONS
LASER RADIATION
LASER-PRODUCED PLASMA
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PLASMA
RADIATIONS
SPECTRA
SUPERCONDUCTING FILMS
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM IONS
YTTRIUM OXIDES