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Time-resolved emission spectra following the 193-nm photoablation of CuO, BaO sub 2 , Y sub 2 O sub 3 , and YBa sub 2 Cu sub 3 O sub 7 minus x in vacuum and oxygen

Journal Article · · Journal of Applied Physics; (United States)
DOI:https://doi.org/10.1063/1.349430· OSTI ID:5411371
;  [1];  [2];  [3]
  1. Department of Chemistry, Wayne State University, Detroit, Michigan (USA)
  2. Wayne State Institute of Manufacturing Research, Detroit, Michigan (USA)
  3. Department of Chemical Engineering, Wayne State University, Detroit, Michigan (USA)

Gated diode array spectra were taken after the photoablation of CuO, BaO{sub 2}, Y{sub 2}O{sub 3}, and YBa{sub 2}Cu{sub 3}O{sub 7} in vacuum and oxygen. An ArF excimer laser (193 nm) was used for photoablation. The spectra were resolved on a microsecond time scale. Emission from ions, atoms, and molecular oxides are observed and identified. Observations in the first microsecond represent phenomena produced in the primary ablation process. This emission is due primarily to high-energy collisions of ejected atoms and ions. Later time observations reveal that excited metal oxides are formed from reactive collisions of barium and yttrium atoms with the background oxygen, when present. Such species may be responsible for improved film quality in the presence of oxygen.

OSTI ID:
5411371
Journal Information:
Journal of Applied Physics; (United States), Journal Name: Journal of Applied Physics; (United States) Vol. 70:4; ISSN 0021-8979; ISSN JAPIA
Country of Publication:
United States
Language:
English