Chemical vapor deposition of refractory metals and ceramics
Conference
·
OSTI ID:6522312
- Oak Ridge National Lab., Oak Ridge, TN (US)
- Stevens Inst. of Tech., Hoboken, NJ (US)
This book contains papers presented at a symposium on chemical vapor deposition of refractory metals and ceramics. Topics covered include: Predicting the chemistry in CVD systems and Light-scattering measurements of CVD silicon carbide.
- OSTI ID:
- 6522312
- Report Number(s):
- CONF-891119--; ISBN: 1-55899-056-9
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360101* -- Metals & Alloys-- Preparation & Fabrication
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360601 -- Other Materials-- Preparation & Manufacture
ABSTRACTS
ALLOYS
CERAMICS
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
CRYSTAL STRUCTURE
DEPOSITION
DOCUMENT TYPES
ELEMENTS
FABRICATION
LEADING ABSTRACT
MATERIALS
METALS
PHYSICAL PROPERTIES
REFRACTORY METALS
SEMICONDUCTOR MATERIALS
SURFACE COATING
360101* -- Metals & Alloys-- Preparation & Fabrication
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360601 -- Other Materials-- Preparation & Manufacture
ABSTRACTS
ALLOYS
CERAMICS
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
CRYSTAL STRUCTURE
DEPOSITION
DOCUMENT TYPES
ELEMENTS
FABRICATION
LEADING ABSTRACT
MATERIALS
METALS
PHYSICAL PROPERTIES
REFRACTORY METALS
SEMICONDUCTOR MATERIALS
SURFACE COATING