Chemical vapor deposition of refractory metals and ceramics II

Conference · Tue Dec 31 23:00:00 EST 1991

OSTI ID:5730574

Besmann, T M ^[1]; Gallois, B M ^[2]; Warren, J W ^[3]

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1. ed.; Oak Ridge National Lab., TN (United States)
2. ed.; Stevens Inst. of Tech., Hoboken, NJ (United States)
3. ed.; Composite Innovation Corp., Woodland Hills, CA (United States)

This symposium was held at the fall meeting of the Materials Research Society in Boston, Massachusetts on December 4--6, 1991. The purpose of this symposium was to provide a forum for exchange of state-of-the-art information on chemical vapor deposition of refractory metals and ceramics II. A number of papers discuss the fundamentals of CVD. They focus on the thermochemistry of CVD and the choice of halide gas species; CVD modeling for high-temperature materials; and kinetics and mass transport in CVD, with an emphasis on silicon carbide deposition. Papers are included which emphasize both the importance of in situ diagnostics and how this area is just now emerging. Papers on microstructure-process-property relationships reveal the ability to control the CVD coatings to a level not seen before. Chemical vapor infiltration to produce composite materials is the subject of a number of other papers and includes considerable discussion of the modeling of the infiltration process. Papers on organometallic CVD focus on a number of issues related to precursors and the mechanisms of deposition. Individual papers are processed separately for inclusion in the appropriate data bases.

• OSTI ID: 5730574
• Report Number(s): CONF-911202--; ISBN: 1-55899-144-1
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360101* -- Metals & Alloys-- Preparation & Fabrication
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
ABSTRACTS
ALLOYS
CERAMICS
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COATINGS
DEPOSITION
DOCUMENT TYPES
ELEMENTS
FABRICATION
LEADING ABSTRACT
MEETINGS
METALS
REFRACTORY METALS
SURFACE COATING
VAPOR DEPOSITED COATINGS