Optical coatings deposited using ion assisted deposition

Journal Article · Wed Jul 01 04:00:00 EDT 1987 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.574940· OSTI ID:6511739

McNally, J J; Jungling, K C; Williams, F L; McNeil, J R

The properties of Ta/sub 2/O/sub 5/ and Al/sub 2/O/sub 3/ optical coatings deposited using oxygen-ion assisted deposition (IAD) were investigated. Previously, we reported preliminary results for Ta/sub 2/O/sub 5/ and Al/sub 2/O/sub 3/ coatings deposited using IAD. In this paper, we present results illustrating the effects of oxygen-ion bombardment on film optical constants, environmental durability, and laser damage resistance. The coatings were bombarded with 200-, 300-, 500-, and 1000-eV oxygen ions during deposition. Increased values of refractive index were obtained for coatings deposited with simultaneous O/sup +//sub 2/ bombardment. Antireflection coatings deposited using IAD did not exhibit increased laser damage thresholds at lambda = 351 nm.

• Research Organization: Department of Physics, United States Air Force Academy, Colorado 80840-5701
• OSTI ID: 6511739
• Journal Information: J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 5:4; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
ANTIREFLECTION COATINGS
CHALCOGENIDES
COATINGS
COLLISIONS
DAMAGE
DATA
DEPOSITION
EXPERIMENTAL DATA
INFORMATION
ION COLLISIONS
NUMERICAL DATA
OPTICAL PROPERTIES
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
REFRACTIVITY
REFRACTORY METAL COMPOUNDS
SURFACE COATING
TANTALUM COMPOUNDS
TANTALUM OXIDES
TRANSITION ELEMENT COMPOUNDS