Ion assisted deposition of optical coatings
Conference
·
OSTI ID:552063
- Shanghai Institute of Optics and Fine Mechanics (China)
Ion assisted deposition technique (IAD) and effects of this technique on properties of optical coatings are investigated in this paper. The authors have produced thin-film samples by bombarding with different ions such as oxygen, argon and mixture of two during deposition, of which the refractive index, the extinctive coefficient and the laser induced damage threshold are analyzed in detail.
- Research Organization:
- International Society for Optical Engineering, Washington, DC (United States)
- OSTI ID:
- 552063
- Report Number(s):
- CONF-9510106--Vol.2714
- Country of Publication:
- United States
- Language:
- English
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