Novel photochemical vapor deposition reactor for amorphous silicon solar cell deposition

Journal Article · Mon Jul 13 04:00:00 EDT 1987 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.98592· OSTI ID:6511250

Rocheleau, R E; Hegedus, S S; Buchanan, W A; Jackson, S C

A novel photochemical vapor deposition (photo-CVD) reactor having a flexible ultraviolet-transparent Teflon curtain and a secondary gas flow to eliminate deposition on the window has been used to deposit amorphous silicon films and p-i-n solar cells. The background levels of atmospheric contaminants (H/sub 2/O, CO/sub 2/, N/sub 2/) depend strongly on the vacuum procedures but not on the presence of a Teflon curtain in the reactor. Intrinsic films with a midgap density of states of 3 x 10/sup 15/ eV/sup -1/ cm/sup -3/ and all-photo-CVD pin solar cells with efficiencies of 8.5% have been deposited.

• Research Organization: Institute of Energy Conversion, University of Delaware, Newark, Delaware 19716
• OSTI ID: 6511250
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 51:2; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
140501 -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360601* -- Other Materials-- Preparation & Manufacture
CARBON COMPOUNDS
CARBON DIOXIDE
CARBON OXIDES
CHALCOGENIDES
CHEMICAL COATING
CHEMICAL REACTORS
CHEMICAL VAPOR DEPOSITION
CHEMISTRY
DEPOSITION
DIRECT ENERGY CONVERTERS
EFFICIENCY
ELEMENTS
ENERGY-LEVEL DENSITY
EQUIPMENT
FABRICATION
FLUID FLOW
FLUIDS
FLUORINATED ALIPHATIC HYDROCARBONS
GAS FLOW
GASES
HALOGENATED ALIPHATIC HYDROCARBONS
HYDROGEN COMPOUNDS
JUNCTIONS
MATERIALS
NEON
NONMETALS
ORGANIC COMPOUNDS
ORGANIC FLUORINE COMPOUNDS
ORGANIC HALOGEN COMPOUNDS
ORGANIC POLYMERS
OXIDES
OXYGEN COMPOUNDS
P-N JUNCTIONS
PETROCHEMICALS
PETROLEUM PRODUCTS
PHOTOCHEMISTRY
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PLASTICS
POLYETHYLENES
POLYMERS
POLYOLEFINS
POLYTETRAFLUOROETHYLENE
RARE GASES
SEMICONDUCTOR JUNCTIONS
SEMIMETALS
SILICON
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SURFACE COATING
SYNTHETIC MATERIALS
TEFLON
WATER