Photochemical vapor deposition of amorphous silicon photovoltaic devices. Semiannual subcontract report, 1 May 1985-31 October 1985
Intrinsic, p-type, and n-type hydrogenated amorphous silicon thin-films have been deposited by mercury-sensitized photochemical vapor deposition (photo-CVD) from disilane. The photochemical reactor design includes two chambers separated by a movable uv-transparent Teflon curtain to eliminate deposition on the reactor window. Glass/TCO/p-i-n/metal photovoltaic devices were fabricated by photo-CVD. The efficiency at 87.5 MW/cm/sup 2/(ELH) was 5.1%.
- Research Organization:
- Delaware Univ., Newark (USA). Inst. of Energy Conversion
- DOE Contract Number:
- AC02-83CH10093
- OSTI ID:
- 5439007
- Report Number(s):
- SERI/STR-211-2967; ON: DE86010729
- Country of Publication:
- United States
- Language:
- English
Similar Records
Photochemical vapor deposition of amorphous silicon photovoltaic devices: Annual subcontract report, 1 May 1985-30 April 1986
Novel photochemical vapor deposition reactor for amorphous silicon solar cell deposition
Low-pressure chemical vapor deposition of amorphous silicon photovoltaic devices. Annual technical progress report, 1 May 1984-30 April 1985
Technical Report
·
Sat Jan 31 23:00:00 EST 1987
·
OSTI ID:6587014
Novel photochemical vapor deposition reactor for amorphous silicon solar cell deposition
Journal Article
·
Mon Jul 13 00:00:00 EDT 1987
· Appl. Phys. Lett.; (United States)
·
OSTI ID:6511250
Low-pressure chemical vapor deposition of amorphous silicon photovoltaic devices. Annual technical progress report, 1 May 1984-30 April 1985
Technical Report
·
Fri Jan 31 23:00:00 EST 1986
·
OSTI ID:5965186
Related Subjects
14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
AMORPHOUS STATE
CHEMICAL COATING
CHEMICAL REACTORS
CHEMICAL VAPOR DEPOSITION
CHEMISTRY
DEPOSITION
DIRECT ENERGY CONVERTERS
EFFICIENCY
ELEMENTS
EQUIPMENT
FABRICATION
FILMS
HYDRIDES
HYDROGEN COMPOUNDS
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
PHOTOCHEMISTRY
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
SEMIMETALS
SILANES
SILICON
SILICON COMPOUNDS
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SURFACE COATING
THIN FILMS
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
AMORPHOUS STATE
CHEMICAL COATING
CHEMICAL REACTORS
CHEMICAL VAPOR DEPOSITION
CHEMISTRY
DEPOSITION
DIRECT ENERGY CONVERTERS
EFFICIENCY
ELEMENTS
EQUIPMENT
FABRICATION
FILMS
HYDRIDES
HYDROGEN COMPOUNDS
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
PHOTOCHEMISTRY
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
SEMIMETALS
SILANES
SILICON
SILICON COMPOUNDS
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SURFACE COATING
THIN FILMS