Photochemical vapor deposition of undoped and n-type amorphous silicon films produced from disilane
Hydrogenated amorphous silicon films have been deposited by mercury photosensitized decomposition (photochemical vapor deposition: photo-CVD) of disilane at a substrate temperature below 300 /sup 0/C. The structural and optical properties of undoped films are very similar to those of films deposited by rf glow discharge decomposition. The electronic property measurement shows that the conductivity strongly depends on the substrate temperature during deposition. The photoconductivity reaches 5.7 x 10/sup -3/ (..cap omega.. cm)/sup -1/ (AM1,100 mW/cm/sup 2/) at a substrate temperature of 200 /sup 0/C. The dark conductivity is 10/sup -6/--10/sup -8/ (..cap omega.. cm)/sup -1/ and the Fermi level is located near the middle of the gap. n-type doping has been also achieved by adding phosphine as an impurity to disilane. Furthermore, a p-i-n a-Si solar cell was fabricated using photo-CVD undoped and P-doped films. The initial cell showed a conversion efficiency of 4.39% under AM1 insolation.
- Research Organization:
- Tokyo Institute of Technology, 2-12-1, Ohokayama, Meguro-Ku, Tokyo 152, Japan
- OSTI ID:
- 5840200
- Journal Information:
- Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 43:8; ISSN APPLA
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
AMORPHOUS STATE
CHEMICAL COATING
CHEMICAL REACTIONS
CHEMICAL VAPOR DEPOSITION
CRYSTAL STRUCTURE
DEPOSITION
DIRECT ENERGY CONVERTERS
DISSOCIATION
EFFICIENCY
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELEMENTS
ENERGY LEVELS
EQUIPMENT
FABRICATION
FERMI LEVEL
FILMS
HYDRIDES
HYDROGEN COMPOUNDS
HYDROGENATION
LOW TEMPERATURE
MATERIALS
MEDIUM TEMPERATURE
N-TYPE CONDUCTORS
OPTICAL PROPERTIES
PHOSPHINES
PHOSPHORUS COMPOUNDS
PHOTOCHEMICAL REACTIONS
PHOTOCONDUCTIVITY
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
SEMICONDUCTOR MATERIALS
SEMIMETALS
SILANES
SILICON
SILICON COMPOUNDS
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SUBSTRATES
SURFACE COATING
THIN FILMS