Hydrogenated amorphous silicon produced by pyrolysis and photolysis of disilane
A new class of hydrogenated amorphous silicon (a-Si:H) was prepared by the thermal CVD and photo-CVD of disilane. In the low pressure thermal CVD, the horizontal quartz tube heated by resistance heaters was used as a reactor. The growth rate of the thermal CVD a-Si:H films is plotted as a function of reciprocal substrate temperature. As a new alternative approach to prepare high quality CVD films at temperatures below 300/sup 0/C, the direct photochemical decomposition of disilane has been attempted utilizing a low pressure mercury lamp as a UV radiation source. In the case of undoped and phosphorus doped films, the growth rate is independent of the substrate temperature. In contrast to this, for boron doping, the growth rate has an activation energy of 0.64 eV as in the case of the thermal CVD although the growth rate of the photo-CVD is about three times as large as that of the thermal CVD. This implies that the photoCVD process in boron doping is dominated by the thermal reaction catalyzed with diborane. The dark conductivity and photoconductivity before and after light exposure (AM-1, 200 mW/cm/sup 2/) exhibit no change, indicating the absence of the light-soak degradation in photo-CVD films. The valency control in thermal CVD and photo-CVD is also successfully carried out.
- Research Organization:
- Corporate Development Department, Mitsuitoatsu Chemicals, Inc., Tokyo
- OSTI ID:
- 5123152
- Report Number(s):
- CONF-840561-
- Journal Information:
- Conf. Rec. IEEE Photovoltaic Spec. Conf.; (United States), Journal Name: Conf. Rec. IEEE Photovoltaic Spec. Conf.; (United States); ISSN CRCND
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
ACTIVATION ENERGY
AMORPHOUS STATE
CHEMICAL COATING
CHEMICAL REACTIONS
CHEMICAL VAPOR DEPOSITION
CRYSTAL GROWTH
DECOMPOSITION
DEPOSITION
ELEMENTS
ENERGY
ENERGY RANGE
EV RANGE
EV RANGE 01-10
FILMS
HYDRIDES
HYDROGEN COMPOUNDS
HYDROGENATION
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
PHOTOCHEMICAL REACTIONS
PHOTOLYSIS
PRODUCTION
PYROLYSIS
SEMIMETALS
SILANES
SILICON
SILICON COMPOUNDS
SURFACE COATING
THERMOCHEMICAL PROCESSES