Investigation of the chemistry of the dielectric/FeCoTb interface by x-ray photoelectron spectroscopy and Auger electron spectroscopy

Journal Article · Wed Jul 01 04:00:00 EDT 1987 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.574815· OSTI ID:6489559

Stickle, W F; Coulman, D

The interfacial chemistry of magneto-optic structures of sputter deposited SiO, SiO/sub 2/, Si/sub 3/N/sub 4//FeCoTb/SiO, SiO/sub 2/, and Si/sub 3/N/sub 4/ was studied in detail by x-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES). XPS and AES depth profiles have revealed a substantial amount of redox chemistry at the dielectric/rare-earth transition metal interfaces. The chemical reactions occur preferentially with the terbium as revealed in the XPS portion of the study by the formation of terbium oxide and terbium silicide. In the case of Si/sub 3/N/sub 4/ evidence of TbN/sub x/ has also been observed. ''As deposited'' and annealed samples of the magneto-optic structures are compared and contrasted. It is concluded that Si/sub 3/N/sub 4/ is a superior dielectric for magneto-optic media.

• Research Organization: Perkin--Elmer Corp., Physical Electronics Laboratory, Mountain View, California 94043
• OSTI ID: 6489559
• Journal Information: J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 5:4; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400102* -- Chemical & Spectral Procedures
ALLOYS
AUGER ELECTRON SPECTROSCOPY
CHALCOGENIDES
CHEMISTRY
COBALT ALLOYS
ELECTRON SPECTROSCOPY
INTERFACES
IRON ALLOYS
MAGNETO-OPTICAL EFFECTS
MINERALS
NITRIDES
NITROGEN COMPOUNDS
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PHOTOELECTRON SPECTROSCOPY
PNICTIDES
RARE EARTH ALLOYS
SILICA
SILICON COMPOUNDS
SILICON NITRIDES
SILICON OXIDES
SPECTROSCOPY
SURFACE PROPERTIES
TERBIUM ALLOYS