Characterization of nitride coatings by Auger electron spectroscopy and x-ray photoelectron spectroscopy

Journal Article · Sat Nov 01 00:00:00 EST 1986 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.573680· OSTI ID:7241037

Hofmann, S

The dependence of technically important properties of wear resistant nitride coatings on chemical composition requires advanced methods of compositional analysis to establish optimized fabrication processes. High spatial resolution and chemical bonding specificity are provided by such techniques as Auger electron spectroscopy (AES) in the form of scanning Auger microscopy (SAM) and x-ray photoelectron spectroscopy (XPS). A survey is given for the study of reactively sputter deposited Ti--N, Hf--N, and Ti--Al--N coatings on high-speed steel substrates using point, line, and in-depth distribution analysis by SAM in conjunction with sputter profiling. Capabilities and limitations of quantitative AES to determine the influence of processing parameters on coating composition are presented. XPS gives additional information on chemical bonding and on quantification. This is particularly important in cases of peak overlapping in Auger spectra (e.g., TiN).

• Research Organization: Max-Planck-Institut fuer Metallforschung, Institut fuer Werkstoffwissenschaften, Seestrasse, D-7000 Stuttgart 1, Federal Republic of Germany
• OSTI ID: 7241037
• Journal Information: J. Vac. Sci. Technol., A; (United States), Vol. 4:6
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ALUMINIUM NITRIDES
AUGER ELECTRON SPECTROSCOPY
CHEMICAL COMPOSITION
PHOTOELECTRON SPECTROSCOPY
SURFACE COATING
HAFNIUM NITRIDES
STEELS
COATINGS
TITANIUM NITRIDES
CHEMICAL BONDS
FABRICATION
QUANTITATIVE CHEMICAL ANALYSIS
SPATIAL RESOLUTION
SPUTTERING
SYNTHESIS
WEAR RESISTANCE
ALLOYS
ALUMINIUM COMPOUNDS
CHEMICAL ANALYSIS
DEPOSITION
ELECTRON SPECTROSCOPY
HAFNIUM COMPOUNDS
IRON ALLOYS
IRON BASE ALLOYS
MECHANICAL PROPERTIES
NITRIDES
NITROGEN COMPOUNDS
PNICTIDES
REFRACTORY METAL COMPOUNDS
RESOLUTION
SPECTROSCOPY
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication
360204 - Ceramics
Cermets
& Refractories- Physical Properties
360202 - Ceramics
Cermets
& Refractories- Structure & Phase Studies