Characterization of nitride coatings by Auger electron spectroscopy and x-ray photoelectron spectroscopy

Journal Article · Sat Nov 01 04:00:00 EST 1986 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.573680· OSTI ID:7241037

Hofmann, S

The dependence of technically important properties of wear resistant nitride coatings on chemical composition requires advanced methods of compositional analysis to establish optimized fabrication processes. High spatial resolution and chemical bonding specificity are provided by such techniques as Auger electron spectroscopy (AES) in the form of scanning Auger microscopy (SAM) and x-ray photoelectron spectroscopy (XPS). A survey is given for the study of reactively sputter deposited Ti--N, Hf--N, and Ti--Al--N coatings on high-speed steel substrates using point, line, and in-depth distribution analysis by SAM in conjunction with sputter profiling. Capabilities and limitations of quantitative AES to determine the influence of processing parameters on coating composition are presented. XPS gives additional information on chemical bonding and on quantification. This is particularly important in cases of peak overlapping in Auger spectra (e.g., TiN).

• Research Organization: Max-Planck-Institut fuer Metallforschung, Institut fuer Werkstoffwissenschaften, Seestrasse, D-7000 Stuttgart 1, Federal Republic of Germany
• OSTI ID: 7241037
• Journal Information: J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 4:6; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
ALLOYS
ALUMINIUM COMPOUNDS
ALUMINIUM NITRIDES
AUGER ELECTRON SPECTROSCOPY
CHEMICAL ANALYSIS
CHEMICAL BONDS
CHEMICAL COMPOSITION
COATINGS
DEPOSITION
ELECTRON SPECTROSCOPY
FABRICATION
HAFNIUM COMPOUNDS
HAFNIUM NITRIDES
IRON ALLOYS
IRON BASE ALLOYS
MECHANICAL PROPERTIES
NITRIDES
NITROGEN COMPOUNDS
PHOTOELECTRON SPECTROSCOPY
PNICTIDES
QUANTITATIVE CHEMICAL ANALYSIS
REFRACTORY METAL COMPOUNDS
RESOLUTION
SPATIAL RESOLUTION
SPECTROSCOPY
SPUTTERING
STEELS
SURFACE COATING
SYNTHESIS
TITANIUM COMPOUNDS
TITANIUM NITRIDES
TRANSITION ELEMENT COMPOUNDS
WEAR RESISTANCE