TiO sub x /Al sub 2 O sub 3 multilayer ceramic thin films

Journal Article · Fri Jun 01 04:00:00 EDT 1990 · Journal of the American Ceramic Society; (USA)

DOI:https://doi.org/10.1111/j.1151-2916.1990.tb09822.x· OSTI ID:6483788

Alexander, K B; Walker, F J; McKee, R A; List, F A ^[1]

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1. Oak Ridge National Lab., TN (USA). Metals and Ceramics Div.

This paper reports on titanium oxide/aluminum oxide films deposited using molecular beam epitaxy methods and characterized by reflection high-energy electron diffraction and transmission electron microscopy techniques. Growth on silicon substrates below 973 K resulted in primarily amorphous multilayers. At 1323 K, the deposition of titanium in an oxygen atmosphere on (0001) Al{sub 2}O{sub 3} substrates resulted in films of Ti{sub 2}O{sub 3}. These films consisted of small domains, up to 60 nm, slightly misoriented from a (11{bar 2}0) {parallel} (11{bar 2}0) orientation relationship. Two variants of Ti{sub 2}O{sub 3} were observed due to multiple positioning during growth. Closing the titanium shutter during a growth resulted in an oriented TiO{sub 2} film.

• DOE Contract Number: AC05-84OR21400
• OSTI ID: 6483788
• Journal Information: Journal of the American Ceramic Society; (USA), Journal Name: Journal of the American Ceramic Society; (USA) Vol. 73:6; ISSN JACTA; ISSN 0002-7820
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
656002 -- Condensed Matter Physics-- General Techniques in Condensed Matter-- (1987-)
656003 -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
CHALCOGENIDES
COHERENT SCATTERING
CRYSTAL GROWTH METHODS
CRYSTAL STRUCTURE
DIFFRACTION
DOMAIN STRUCTURE
ELECTRON DIFFRACTION
ELECTRON MICROSCOPY
ELEMENTS
EPITAXY
FILMS
GRAIN ORIENTATION
MICROSCOPY
MICROSTRUCTURE
MOLECULAR BEAM EPITAXY
ORIENTATION
OXIDES
OXYGEN COMPOUNDS
SCATTERING
SEMIMETALS
SILICON
SUBSTRATES
THIN FILMS
TITANIUM COMPOUNDS
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS
TRANSMISSION ELECTRON MICROSCOPY