Epitaxy of TiO sub 2 thin film on sapphire by MOCVD
Conference
·
OSTI ID:7009584
Epitaxial TiO{sub 2} films have been successfully grown on sapphire substrate at temperatures from 400 to 800{degree}C by thermally decomposing titanium isopropoxide in the presence of O{sub 2} in a cold wall low pressure MOCVD system. Rutile film was grown on sapphire (11{bar 2}0) at 800{degree}C with (101) being the growth plane and {l angle}1{bar 1}0{r angle} being parallel to sapphire {l angle}0001{r angle}. Anatase film was grown on sapphire (0001) at 400{degree}C with (112) being the growth plane and {l angle}1{bar 1}0{r angle} being parallel to sapphire {l angle}{bar 1}100{r angle}. The film structure as a function of substrate surface orientation and growth temperature is discussed in detail. 7 refs., 5 figs.
- Research Organization:
- Argonne National Lab., IL (USA)
- Sponsoring Organization:
- DOE/ER
- DOE Contract Number:
- W-31109-ENG-38
- OSTI ID:
- 7009584
- Report Number(s):
- CONF-900466-13; ON: DE90010054
- Country of Publication:
- United States
- Language:
- English
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OSTI ID:6152641
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· Journal of Materials Research; (United States)
·
OSTI ID:6257057
Related Subjects
36 MATERIALS SCIENCE
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
CHALCOGENIDES
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COHERENT SCATTERING
CORUNDUM
DEPOSITION
DIFFRACTION
EPITAXY
FILMS
MINERALS
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SAPPHIRE
SCATTERING
SUBSTRATES
SURFACE COATING
THIN FILMS
TITANIUM COMPOUNDS
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS
X-RAY DIFFRACTION
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
CHALCOGENIDES
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COHERENT SCATTERING
CORUNDUM
DEPOSITION
DIFFRACTION
EPITAXY
FILMS
MINERALS
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SAPPHIRE
SCATTERING
SUBSTRATES
SURFACE COATING
THIN FILMS
TITANIUM COMPOUNDS
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS
X-RAY DIFFRACTION