Ion chamber for electron-bombardment Ion sources
Patent
·
OSTI ID:6468583
A multipole electron-bombardment type ion source includes an ion chamber defined by chamber walls and magnetic elements of an electrically insulating, permanently magnetized material. The magnetic elements provide mechanical support for anode elements and electrically isolate the anode elements from the chamber walls. In a preferred embodiment, the magnetic elements and the anode elements form a layered structure.
- Assignee:
- Varian Associates Inc.
- Patent Number(s):
- US 4516050
- OSTI ID:
- 6468583
- Country of Publication:
- United States
- Language:
- English
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