Inverted magnetron ion source

Patent · Tue Sep 17 04:00:00 EDT 1985

OSTI ID:5890033

Singh, B; Boyarsky, D

The present invention provides, in a preferred embodiment, a cylindrical stainless steel cathode with end pieces thereon to form a cathode chamber within. In addition, in a preferred embodiment, there is a stainless steel rod which passes axially through the cathode chamber and which is electrically insulated therefrom at the end pieces. The stainless steel cathode has first and second apertures formed therein with the first to be connected to a source of ionizable gas and the second to act as the opening through which there passes a stream of ions to an ion beam target. A magnetic flux source is coupled to the cathode chamber to pass magnetic flux therethrough and a voltage source is connected between the anode and the cathode to provide an electrostatic field therebetween whereby when ionizable gas is fed into the cathode chamber, it is ionized and a stream of ions emanates from the second aperture. In a preferred embodiment there is further provided an electrostatic ion focusing means to focus the ion stream emanating from the second aperture.

• Assignee: Denton Vacuum Inc.
• Patent Number(s): US 4542321
• OSTI ID: 5890033
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
430301* -- Particle Accelerators-- Ion Sources
ALLOYS
ANODES
BEAMS
CATHODES
CHROMIUM ALLOYS
CORROSION RESISTANT ALLOYS
ELECTRIC POTENTIAL
ELECTRICAL INSULATION
ELECTRODES
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
FLUIDS
FOCUSING
GASES
ION BEAMS
ION SOURCES
IONIZED GASES
IRON ALLOYS
IRON BASE ALLOYS
MAGNETIC FLUX
MAGNETRONS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
OPERATION
SPECIFICATIONS
STAINLESS STEELS
STEELS