Preparation and properties of tin-doped indium oxide thin films by thermal decomposition of organometallic compounds

Journal Article · Fri Aug 01 04:00:00 EDT 1986 · Mater. Res. Bull.; (United States)

DOI:https://doi.org/10.1016/0025-5408(86)90137-6· OSTI ID:6452802

Furusaki, T; Kodaira, K; Yamamoto, M; Shimada, S; Matsushita, T

Transparent and conductive tin-doped indium oxide thin films were prepared on soda-lime and quartz glass substrates by thermal decomposition of organometallic compounds. The optical transmittance of the films was 90% in the visible region. The electric resistivity changed from 6-8 x 10/sup 3-/ ..cap omega..-cm to 3-4 x 10/sup -2/ ..cap omega..-cm, depending on composition and, after annealing in vacuum, it decreased by a factor of 2-10.

• Research Organization: Dept. of Applied Chemistry, Faculty of Engineering, Hokkaido Univ., Sapporo 060
• OSTI ID: 6452802
• Journal Information: Mater. Res. Bull.; (United States), Journal Name: Mater. Res. Bull.; (United States) Vol. 21:8; ISSN MRBUA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
360601 -- Other Materials-- Preparation & Manufacture
360603 -- Materials-- Properties
ALKALI METAL COMPOUNDS
ANNEALING
CHALCOGENIDES
CHEMICAL PREPARATION
CRYSTAL DOPING
DOPED MATERIALS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELEMENTS
FABRICATION
FILMS
GLASS
HEAT TREATMENTS
INDIUM COMPOUNDS
INDIUM OXIDES
MATERIALS
METALS
MINERALS
OPACITY
OPTICAL PROPERTIES
ORGANIC COMPOUNDS
ORGANOMETALLIC COMPOUNDS
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
QUARTZ
SILICON COMPOUNDS
SILICON OXIDES
SODIUM COMPOUNDS
SUBSTRATES
SYNTHESIS
THERMAL DEGRADATION
THIN FILMS
TIN
VACUUM SYSTEMS