Preparation and characterization of indium-tin-oxide deposited by direct thermal evaporation of metal indium and tin

Journal Article · Sat Aug 01 00:00:00 EDT 1987 · J. Electrochem. Soc.; (United States)

DOI:https://doi.org/10.1149/1.2100819· OSTI ID:5975307

Jan, S W; Lee, S C

Films of the transparent conductor-tin-oxide (ITO) have been deposited successfully by direct thermal evaporation of metallic indium and tin in an oxygen ambient. Various techniques, such as scanning and transmission electron microscopy, x-ray diffraction, electron microprobe analysis, Hall measurements, and optical transmission measurements, were applied to determine the crystal structure and to measure grain size, tin concentration, optical transmittance, electron concentration, and the mobility of the ITO films. It is found that the key point in reducing the resistivity of the ITO film is by controlling the tin to indium weight ratio to an optimum value of 3 to 1. ITO films with resistivity as low as 1.8 x 10/sup -4/ ..cap omega..-cm and an average optical transmittance as high as 90% can be achieved reproducibly. The films are polycrystalline with a bcc structure and a grain size of approximately 500A.

• Research Organization: Dept. of Electrical Engineering, National Taiwan Univ., Taipei
• OSTI ID: 5975307
• Journal Information: J. Electrochem. Soc.; (United States), Journal Name: J. Electrochem. Soc.; (United States) Vol. 134:8A; ISSN JESOA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
BCC LATTICES
CHALCOGENIDES
CHEMICAL PREPARATION
COHERENT SCATTERING
CRYSTAL LATTICES
CRYSTAL STRUCTURE
CRYSTALS
CUBIC LATTICES
DEPOSITION
DIFFRACTION
ELECTRIC CONDUCTIVITY
ELECTRIC CONDUCTORS
ELECTRICAL PROPERTIES
ELECTRON MICROSCOPY
ELEMENTS
EVAPORATION
FABRICATION
FILMS
GRAIN SIZE
INDIUM
INDIUM COMPOUNDS
INDIUM OXIDES
METALS
MICROSCOPY
MICROSTRUCTURE
NONMETALS
OPACITY
OPTICAL MICROSCOPY
OPTICAL PROPERTIES
OXIDES
OXYGEN
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
PHYSICAL PROPERTIES
POLYCRYSTALS
QUANTITY RATIO
SCANNING ELECTRON MICROSCOPY
SCATTERING
SIZE
STRUCTURAL CHEMICAL ANALYSIS
SYNTHESIS
TIN
TIN COMPOUNDS
TIN OXIDES
TRANSMISSION ELECTRON MICROSCOPY
X-RAY DIFFRACTION