Crystallographic phase identification in the scanning electron microscope: Backscattered electron Kikuchi patterns
Conference
·
OSTI ID:6444325
Use of charge coupled device-based detector for acquisition of high-quality backscattered electron Kikuchi patterns (BEKP) allows on-line crystallographic phase identification in the SEM. Phase identification through combined BEKP and energy dispersive x-ray spectrometry is demonstrated using Ru oxide thin films on Si, which were identified as tetragonal RuO[sub 2]. (DLC)
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- DOE; USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 6444325
- Report Number(s):
- SAND-93-0813C; CONF-930822--2; ON: DE93011574
- Country of Publication:
- United States
- Language:
- English
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Crystallographic phase identification in the scanning electron microscope: Backscattered electron Kikuchi patterns
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Related Subjects
36 MATERIALS SCIENCE
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400101* -- Activation
Nuclear Reaction
Radiometric & Radiochemical Procedures
BACKSCATTERING
CHALCOGENIDES
CRYSTALLOGRAPHY
ELECTRON MICROSCOPY
ELECTRONS
ELEMENTARY PARTICLES
FERMIONS
KIKUCHI LINES
LEPTONS
MICROSCOPY
OXIDES
OXYGEN COMPOUNDS
PHASE STUDIES
REFRACTORY METAL COMPOUNDS
RUTHENIUM COMPOUNDS
RUTHENIUM OXIDES
SCANNING ELECTRON MICROSCOPY
SCATTERING
SPECTROSCOPY
TRANSITION ELEMENT COMPOUNDS
X-RAY SPECTROSCOPY
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400101* -- Activation
Nuclear Reaction
Radiometric & Radiochemical Procedures
BACKSCATTERING
CHALCOGENIDES
CRYSTALLOGRAPHY
ELECTRON MICROSCOPY
ELECTRONS
ELEMENTARY PARTICLES
FERMIONS
KIKUCHI LINES
LEPTONS
MICROSCOPY
OXIDES
OXYGEN COMPOUNDS
PHASE STUDIES
REFRACTORY METAL COMPOUNDS
RUTHENIUM COMPOUNDS
RUTHENIUM OXIDES
SCANNING ELECTRON MICROSCOPY
SCATTERING
SPECTROSCOPY
TRANSITION ELEMENT COMPOUNDS
X-RAY SPECTROSCOPY