Crystallographic phase identification in the scanning electron microscope: Backscattered electron Kikuchi patterns
Conference
·
OSTI ID:10146083
Use of charge coupled device-based detector for acquisition of high-quality backscattered electron Kikuchi patterns (BEKP) allows on-line crystallographic phase identification in the SEM. Phase identification through combined BEKP and energy dispersive x-ray spectrometry is demonstrated using Ru oxide thin films on Si, which were identified as tetragonal RuO{sub 2}. (DLC)
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 10146083
- Report Number(s):
- SAND--93-0813C; CONF-930822--2; ON: DE93011574
- Country of Publication:
- United States
- Language:
- English
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Crystallographic phase identification in the scanning electron microscope: Backscattered electron Kikuchi patterns
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Related Subjects
36 MATERIALS SCIENCE
360202
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400101
ACTIVATION, NUCLEAR REACTION, RADIOMETRIC, AND RADIOCHEMICAL PROCEDURES
BACKSCATTERING
CRYSTALLOGRAPHY
ELECTRONS
KIKUCHI LINES
PHASE STUDIES
RUTHENIUM OXIDES
SCANNING ELECTRON MICROSCOPY
STRUCTURE AND PHASE STUDIES
X-RAY SPECTROSCOPY
360202
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400101
ACTIVATION, NUCLEAR REACTION, RADIOMETRIC, AND RADIOCHEMICAL PROCEDURES
BACKSCATTERING
CRYSTALLOGRAPHY
ELECTRONS
KIKUCHI LINES
PHASE STUDIES
RUTHENIUM OXIDES
SCANNING ELECTRON MICROSCOPY
STRUCTURE AND PHASE STUDIES
X-RAY SPECTROSCOPY