Hydrogen-implanted silicon nitride
Chemical bonding changes and electrical effects of hydrogen implantation into silicon nitride have been investigated. Silicon nitride films were prepared by chemical vapor deposition from the decomposition products of NH/sub 3/ and SiH/sub 4/ gases onto silicon substrates at 850/degree/C. Implantation of either hydrogen or deuterium causes Si-H bond formation by transfering deposition-incorporated hydrogen from nitrogen to silicon bonds. The implanted hydrogen isotope, however, bonds predominantly on nitrogen. Displacement damage, which causes the N-H band to broaden and shift to lower frequencies, is reduced by annealing at 500/degree/C, and a loss of both N-H and Si-H bonds occurs when implanted films are annealed at temperatures >500/degree/C. The observed electrical effects of hydrogen implantation of silicon nitride followed by annealing at 500/degree/C are increased equilibrium positive charge, decreased charge transport, and enhanced charge trapping and retention. 23 refs.
- Research Organization:
- Sandia Natl Lab, Albuquerque, NM, USA
- OSTI ID:
- 6435994
- Journal Information:
- J. Electrochem. Soc.; (United States), Journal Name: J. Electrochem. Soc.; (United States) Vol. 129:8; ISSN JESOA
- Country of Publication:
- United States
- Language:
- English
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ABSORPTION SPECTRA
AMMONIA
ANNEALING
CHEMICAL BONDS
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
DEPOSITION
DEUTERIUM
ELEMENTS
FILMS
HEAT TREATMENTS
HYDRIDES
HYDROGEN
HYDROGEN COMPOUNDS
HYDROGEN ISOTOPES
HYSTERESIS
ION IMPLANTATION
ISOTOPES
LIGHT NUCLEI
NITRIDES
NITROGEN COMPOUNDS
NITROGEN HYDRIDES
NONMETALS
NUCLEI
ODD-ODD NUCLEI
PNICTIDES
SILANES
SILICON COMPOUNDS
SILICON NITRIDES
SPECTRA
STABLE ISOTOPES
SURFACE COATING
VERY HIGH TEMPERATURE