Three micron CMOS technology for custom high reliability and radiation-hardened integrated circuits
Conference
·
OSTI ID:6434795
A new radiation hardened three micron CMOS process has been developed. It uses a guardbanded P-well with single level polysilicon and single level metal. Plasma processing is used for etching the critical dimension levels of polysilicon, contact window and metal. To date, fifteen designs have been fabricated using the technology. These include CMOS equivalents of the Intel 8085 8-bit microprocessor family, two custom encryption chips of about 19,000 transistors each and custom logic designs using Sandia's standard cell family. Performance of the devices has exceeded all specifications.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (USA)
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 6434795
- Report Number(s):
- SAND-83-0823C; CONF-830537-1; ON: DE83010825
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
42 ENGINEERING
420800 -- Engineering-- Electronic Circuits & Devices-- (-1989)
440200* -- Radiation Effects on Instrument Components
Instruments
or Electronic Systems
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
COMPUTERS
CRYSTALS
DESIGN
ELECTRIC CONTACTS
ELECTRICAL EQUIPMENT
ELECTRONIC CIRCUITS
ELEMENTS
EQUIPMENT
ETCHING
FABRICATION
HARDENING
INTEGRATED CIRCUITS
MICROELECTRONIC CIRCUITS
MICROPROCESSORS
MOS TRANSISTORS
PERFORMANCE
PHYSICAL RADIATION EFFECTS
POLYCRYSTALS
RADIATION EFFECTS
RADIATION HARDENING
SEMICONDUCTOR DEVICES
SEMIMETALS
SILICON
SURFACE FINISHING
TRANSISTORS
420800 -- Engineering-- Electronic Circuits & Devices-- (-1989)
440200* -- Radiation Effects on Instrument Components
Instruments
or Electronic Systems
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
COMPUTERS
CRYSTALS
DESIGN
ELECTRIC CONTACTS
ELECTRICAL EQUIPMENT
ELECTRONIC CIRCUITS
ELEMENTS
EQUIPMENT
ETCHING
FABRICATION
HARDENING
INTEGRATED CIRCUITS
MICROELECTRONIC CIRCUITS
MICROPROCESSORS
MOS TRANSISTORS
PERFORMANCE
PHYSICAL RADIATION EFFECTS
POLYCRYSTALS
RADIATION EFFECTS
RADIATION HARDENING
SEMICONDUCTOR DEVICES
SEMIMETALS
SILICON
SURFACE FINISHING
TRANSISTORS