Plasma diagnostic studies of the influence of process variables upon the atomic and molecular species ejected from (1-x)Li sub 4 SiO sub 4 :xLi sub 3 PO sub 4 targets during rf-magnetron sputtering
Conference
·
OSTI ID:6413410
The deposition of thin-film electrolytes is a critical step in the development of lithium microbatteries with the potential for circuit integration. We have performed a preliminary study of the rf-magnetron sputtering of (1-x)Li{sub 4}SiO{sub 4}:xLi{sub 3}PO{sub 4} targets used to deposit amorphous thin-film electrolytes formed of the three-component system Li{sub 2}O--SiO{sub 2}--P{sub 2}O{sub 5}. Mass and optical emission spectroscopies have been used to investigate the effects of target composition and the deposition conditions upon the atomic and molecular species ejected from the targets. The data provide important information for understanding the mechanism of film formation and for monitoring the Li atomic flux onto the substrates during film growth. 5 refs., 7 figs., 1 tab.
- Research Organization:
- Oak Ridge National Lab., TN (USA)
- Sponsoring Organization:
- DOE/ER
- DOE Contract Number:
- AC05-84OR21400
- OSTI ID:
- 6413410
- Report Number(s):
- CONF-901035-11; ON: DE91002327
- Country of Publication:
- United States
- Language:
- English
Similar Records
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Conference
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Radio-frequency magnetron sputtering of pure and mixed targets of Li[sub 4]SiO[sub 4], Li[sub 3]PO[sub 4], and Li[sub 2]O
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OSTI ID:6728033
Related Subjects
25 ENERGY STORAGE
250903 -- Energy Storage-- Batteries-- Materials
Components
& Auxiliaries
656003* -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALI METAL COMPOUNDS
CHALCOGENIDES
ELECTRIC BATTERIES
ELECTROCHEMICAL CELLS
ELECTROLYTES
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
FILMS
LITHIUM COMPOUNDS
LITHIUM OXIDES
MAGNETRONS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
OXIDES
OXYGEN COMPOUNDS
PHOSPHORUS COMPOUNDS
PHOSPHORUS OXIDES
PLASMA DIAGNOSTICS
SILICON COMPOUNDS
SILICON OXIDES
SPECTROSCOPY
SPUTTERING
SUBSTRATES
THIN FILMS
250903 -- Energy Storage-- Batteries-- Materials
Components
& Auxiliaries
656003* -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALI METAL COMPOUNDS
CHALCOGENIDES
ELECTRIC BATTERIES
ELECTROCHEMICAL CELLS
ELECTROLYTES
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
FILMS
LITHIUM COMPOUNDS
LITHIUM OXIDES
MAGNETRONS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
OXIDES
OXYGEN COMPOUNDS
PHOSPHORUS COMPOUNDS
PHOSPHORUS OXIDES
PLASMA DIAGNOSTICS
SILICON COMPOUNDS
SILICON OXIDES
SPECTROSCOPY
SPUTTERING
SUBSTRATES
THIN FILMS