Deposition of electrolyte and cathode thin films by magnetron sputtering

Conference · Mon May 01 04:00:00 EDT 1989

OSTI ID:6112931

Bates, J B; Dudney, N J; Luck, C F; Klatt, L

A variety of ceramic materials exhibit sufficiently high ionic and mixed ionic-electronic conductivities to make them useful as electrolytes and electrodes for batteries, sensors, fuel cells, electrochemical displays, and for other applications. The ability to fabricate these materials in thin-film form offers possibilities for the development of solid state, microsized electrochemical devices that could be incorporated into integrated circuits. An example of such a device is the thin-film, rechargeable lithium battery. This cell potentially could be fabricated directly onto an IC substrate to serve as a backup power source for a CMOS-SRAM memory. We have fabricated several of these thin-film cells using magnetron sputtering and electron beam evaporation to deposit the various layers. One of these cells produced a steady current of 1 ..mu..A at 3.2 volts. The performance of such thin-film cells after many charge-discharge cycles and their long term quiescent stability depend on the properties of the cathode and electrolyte films, as well as the anode-electrolyte and cathode-electrolyte junctions. Depositing films which minimize the resistance to lithium ion transport through the cell is a major challenge in the development of practical microbattery. In this paper, we summarize some recent results on the deposition and properties of lithium-ion conducting xLi/sub 4/SiO/sub 4/:yLi/sub 3/PO/sub 4/ glass electrolyte and V/sub 2/O/sub 5/ cathode films. 12 refs., 6 figs.

• Research Organization: Oak Ridge National Lab., TN (USA)
• DOE Contract Number: AC05-84OR21400
• OSTI ID: 6112931
• Report Number(s): CONF-890421-9; ON: DE89013547
• Country of Publication: United States
• Language: English

Related Subjects

25 ENERGY STORAGE
250903* -- Energy Storage-- Batteries-- Materials
Components
& Auxiliaries
36 MATERIALS SCIENCE
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
360603 -- Materials-- Properties
ALKALI METAL COMPOUNDS
CHALCOGENIDES
CRYSTAL STRUCTURE
DEPOSITION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTROCHEMICAL CELLS
ELECTROLYTES
FABRICATION
FILMS
HOT PRESSING
INTERFACES
LITHIUM COMPOUNDS
LITHIUM PHOSPHATES
MATERIALS WORKING
MICROSTRUCTURE
OXIDES
OXYGEN COMPOUNDS
PHOSPHATES
PHOSPHORUS COMPOUNDS
PHYSICAL PROPERTIES
PRESSING
SILICON COMPOUNDS
SILICON OXIDES
SINTERING
SPUTTERING
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
VANADIUM COMPOUNDS
VANADIUM OXIDES