Preferential sputtering of Ta/sub 2/O/sub 5/ by argon ions
Journal Article
·
· J. Vac. Sci. Technol.; (United States)
X-ray photoelectron spectroscopy has been used to show that Ar/sup +/ preferentially sputters O from the surface to Ta/sub 2/O/sub 5/. In addition, x-ray photoelectron, Auger electron, ion scattering, and secondary ion mass spectroscopies were used to show that more reduction of Ta/sub 2/O/sub 5/ is caused by 0.5 keV Ar/sup +/ than by 5 keV Ar/sup +/. This dependence of preferred sputtering upon energy is attributed to changes in the sputtering mechanisms.
- Research Organization:
- Sandia Laboratories, Albuquerque, New Mexico 87115
- OSTI ID:
- 6352491
- Journal Information:
- J. Vac. Sci. Technol.; (United States), Journal Name: J. Vac. Sci. Technol.; (United States) Vol. 16:2; ISSN JVSTA
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ARGON IONS
CHALCOGENIDES
CHARGED PARTICLES
COLLISIONS
ELECTROMAGNETIC RADIATION
ELECTRON SPECTROSCOPY
ENERGY DEPENDENCE
ENERGY RANGE
EV RANGE
EV RANGE 100-1000
IONIZING RADIATIONS
IONS
KEV RANGE
KEV RANGE 01-10
MASS SPECTROSCOPY
OXIDES
OXYGEN COMPOUNDS
PHOTOELECTRON SPECTROSCOPY
RADIATIONS
SPECTROSCOPY
SPUTTERING
TANTALUM COMPOUNDS
TANTALUM OXIDES
TRANSITION ELEMENT COMPOUNDS
X RADIATION
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ARGON IONS
CHALCOGENIDES
CHARGED PARTICLES
COLLISIONS
ELECTROMAGNETIC RADIATION
ELECTRON SPECTROSCOPY
ENERGY DEPENDENCE
ENERGY RANGE
EV RANGE
EV RANGE 100-1000
IONIZING RADIATIONS
IONS
KEV RANGE
KEV RANGE 01-10
MASS SPECTROSCOPY
OXIDES
OXYGEN COMPOUNDS
PHOTOELECTRON SPECTROSCOPY
RADIATIONS
SPECTROSCOPY
SPUTTERING
TANTALUM COMPOUNDS
TANTALUM OXIDES
TRANSITION ELEMENT COMPOUNDS
X RADIATION