Niobium nitride thin films for use in josephson junctions

Conference · Fri Mar 01 04:00:00 EST 1985 · IEEE Trans. Magn.; (United States)

OSTI ID:6340243

Cukauskas, E J; Carter, W L; Gardi, S B; Skelton, E F

The properties of rf diode and magnetron reactively sputtered NbN films have been studied under a variety of preparation conditions. The aim of this investigation is to achieve high transition temperature, low resistivity films under conditions suitable for use in all refractory tunnel junction fabrication. We have systematically varied the relative amounts of Ar, N/sub 2/ and CH/sub 4/ gases, and the substrate temperature used during film growth. The transition temperature, resistivity, lattice parameter and crystal structure have been studied and correlated with the partial pressure of methane used during sputtering. The crystal structure was investigated using diffractometer and Read camera photographic X-ray techniques. We have prepared NbN films using both rf diode and magnetron sputtering with resistivities less than 70 ..mu cap omega..-cm and transition temperatures greater than 16 K. The lattice parameter for our NbN films ranges between 4.39 A and 4.45 A and is dependent upon the amount of nitrogen and carbon used in the film preparation. We are currently investigating all refractory tunnel junctions with artificial barriers using these films as base electrodes and niobium counter electrodes.

• Research Organization: Naval Research Laboratory, Washington, D.C.
• OSTI ID: 6340243
• Report Number(s): CONF-840937-
• Conference Information: Journal Name: IEEE Trans. Magn.; (United States) Journal Volume: MAG 21:2
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360104 -- Metals & Alloys-- Physical Properties
420201* -- Engineering-- Cryogenic Equipment & Devices
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ATMOSPHERES
CONTROLLED ATMOSPHERES
CRYSTAL GROWTH METHODS
CRYSTAL LATTICES
CRYSTAL STRUCTURE
CRYSTALLOGRAPHY
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ENTHALPY
FABRICATION
FILMS
JOSEPHSON JUNCTIONS
JUNCTIONS
NIOBIUM COMPOUNDS
NIOBIUM NITRIDES
NITRIDES
NITROGEN COMPOUNDS
PHYSICAL PROPERTIES
PNICTIDES
REFRACTORY METAL COMPOUNDS
RF SYSTEMS
SPUTTERING
SUPERCONDUCTING FILMS
SUPERCONDUCTING JUNCTIONS
SUPERCONDUCTIVITY
THERMODYNAMIC PROPERTIES
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
TRANSITION HEAT