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Role of nitrogen ions in ion-beam reactive sputtering in NbN

Technical Report ·
OSTI ID:6340077
; ;
Using ion-beam reactive sputtering of a niobium target, we have studied the effects of energetic-nitrogen-ion bombardment on the target reaction and on the resulting NbN film properties. Nitrogen is either added into the ion source with the noble gas to obtain a beam of nitrogen and argon ions, or injected directly into the chamber as neutral molecules so the ion beam is composed of essentially all argon. The target reaction rate is seen to be controlled by the adsorbed thermal nitrogen, and only minimally affected by the presence of ionized nitrogen. Thus, argon-ion bombardment of the target is responsible for stimulating the reaction between the adsorbed nitrogen and the metal target producing the NbN layer. However, the film properties are affected by the presence of nitrogen ions. Films grown with N2 added in the ion source have a higher resistivity and lower superconducting transition temperature than films grown with N2 injected directly into the chamber.
Research Organization:
Massachusetts Inst. of Tech., Lexington, MA (USA). Lincoln Lab.
OSTI ID:
6340077
Report Number(s):
AD-A-224960/5/XAB; MS--8438; CNN: F19628-C-90-0002
Country of Publication:
United States
Language:
English

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Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ADSORPTION
ARGON
ARGON IONS
BEAMS
CHARGED PARTICLES
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELEMENTS
FABRICATION
FILMS
FLUIDS
GASES
ION BEAMS
ION SOURCES
IONIZATION
IONS
LOW TEMPERATURE
METALS
MOLECULES
NIOBIUM
NIOBIUM COMPOUNDS
NIOBIUM NITRIDES
NITRIDES
NITROGEN
NITROGEN COMPOUNDS
NITROGEN IONS
NONMETALS
PHYSICAL PROPERTIES
PNICTIDES
RARE GASES
REFRACTORY METAL COMPOUNDS
SORPTION
SPUTTERING
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
TARGETS
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
TRANSITION TEMPERATURE