Surface type conversion of InP by H[sub 2]S plasma exposure: A photoemission investigation

Journal Article · Thu Jul 01 04:00:00 EDT 1993 · Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States)

DOI:https://doi.org/10.1116/1.578807· OSTI ID:6300052

Nelson, A J ^[1]; Frigo, S P ^[2]; Rosenberg, R ^[3]

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1. National Renewable Energy Laboratory, Golden, Colorado 80401 (United States)
2. Synchrotron Radiation Center, University of Wisconsin-Madison, Stoughton, Wisconsin 53589 (United States)
3. Argonne National Laboratory/Advanced Photon Source, Argonne, Illinois 60439 (United States)

The surface chemistry and the electronic structure of InP(100) before and after exposure to a H[sub 2]S plasma was investigated by synchrotron radiation soft x-ray photoemission spectroscopy. The low power H[sub 2]S plasma was generated with a commercial electron cyclotron resonance plasma source using H[sub 2]S with the plasma exposure being performed as a function of incident angle and temperature. Plasma species were identified with optical emission spectroscopy. [ital In] [ital situ] photoemission measurements were acquired after each plasma exposure in order to observe changes in the valence band electronic structure as well as changes in the In 4[ital d], P 2[ital p], and S 2[ital p] core lines. The results were correlated in order to relate the plasma species and characteristics to changes in surface chemistry and electronic properties. These measurements indicate that the H[sub 2]S plasma exposure type converts the [ital p]-type InP(100) surface to an [ital n]-type surface resulting in a shallow homojunction interface.

• DOE Contract Number: AC02-83CH10093
• OSTI ID: 6300052
• Journal Information: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States), Journal Name: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States) Vol. 11:4; ISSN 0734-2101; ISSN JVTAD6
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360605* -- Materials-- Radiation Effects
CHALCOGENIDES
CHEMICAL BONDS
COLLISIONS
ELECTROMAGNETIC RADIATION
ELECTRON SPECTROSCOPY
ELECTRONIC STRUCTURE
HYDROGEN COMPOUNDS
HYDROGEN SULFIDES
INDIUM COMPOUNDS
INDIUM PHOSPHIDES
ION COLLISIONS
IONIZING RADIATIONS
PHOSPHIDES
PHOSPHORUS COMPOUNDS
PHOTOELECTRON SPECTROSCOPY
PHYSICAL RADIATION EFFECTS
PLASMA
PNICTIDES
RADIATION EFFECTS
RADIATIONS
SOFT X RADIATION
SPECTROSCOPY
SULFIDES
SULFUR COMPOUNDS
SURFACE PROPERTIES
X RADIATION