Micro-machined resonator
A micro-machined resonator, typically quartz, with upper and lower micro-machinable support members, or covers, having etched wells which may be lined with conductive electrode material, between the support members is a quartz resonator having an energy trapping quartz mesa capacitively coupled to the electrode through a diaphragm; the quartz resonator is supported by either micro-machined cantilever springs or by thin layers extending over the surfaces of the support. If the diaphragm is rigid, clock applications are available, and if the diaphragm is resilient, then transducer applications can be achieved. Either the thin support layers or the conductive electrode material can be integral with the diaphragm. In any event, the covers are bonded to form a hermetic seal and the interior volume may be filled with a gas or may be evacuated. In addition, one or both of the covers may include oscillator and interface circuitry for the resonator.
- DOE Contract Number:
- AC04-76DP00789
- Assignee:
- Dept. of Energy, Washington, DC (United States)
- Patent Number(s):
- A; US 5198716
- Application Number:
- PPN: US 7-803815
- OSTI ID:
- 6229667
- Country of Publication:
- United States
- Language:
- English
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Micro-machined resonator oscillator
Micro-machined resonator oscillator
Related Subjects
426000* -- Engineering-- Components
Electron Devices & Circuits-- (1990-)
BONDING
DESIGN
ELECTRODES
ELECTRONIC EQUIPMENT
EQUIPMENT
ETCHING
FABRICATION
JOINING
MACHINE PARTS
MECHANICAL STRUCTURES
MINERALS
OXIDE MINERALS
QUARTZ
RESONATORS
SEALS
SPRINGS
SUPPORTS
SURFACE FINISHING
TRANSDUCERS