Micro-machined resonator

Patent · 31 December 1992

OSTI ID:868721

Godshall, Ned A ^[1]; Koehler, Dale R ^[1]; Liang, Alan Y ^[1]; Smith, Bradley K ^[1]

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1. Albuquerque, NM

A micro-machined resonator, typically quartz, with upper and lower micro-machinable support members, or covers, having etched wells which may be lined with conductive electrode material, between the support members is a quartz resonator having an energy trapping quartz mesa capacitively coupled to the electrode through a diaphragm; the quartz resonator is supported by either micro-machined cantilever springs or by thin layers extending over the surfaces of the support. If the diaphragm is rigid, clock applications are available, and if the diaphragm is resilient, then transducer applications can be achieved. Either the thin support layers or the conductive electrode material can be integral with the diaphragm. In any event, the covers are bonded to form a hermetic seal and the interior volume may be filled with a gas or may be evacuated. In addition, one or both of the covers may include oscillator and interface circuitry for the resonator.

• Research Organization: AT & T CORP
• DOE Contract Number: AC04-76DP00789
• Assignee: United States of America as represented by United States (Washington, DC)
• Patent Number(s): US 5198716
• OSTI ID: 868721
• Country of Publication: United States
• Language: English

Related Subjects

/310/
achieved
addition
applications
available
bonded
cantilever
cantilever spring
capacitively
capacitively coupled
circuitry
clock
conductive
conductive electrode
coupled
covers
diaphragm
electrode
electrode material
energy
etched
evacuated
event
extending
filled
form
gas
hermetic
hermetic seal
integral
interface
interior
layers
lined
material
mesa
micro-machinable
micro-machined
micro-machined resonator
oscillator
quartz
quartz resonator
resilient
resonator
rigid
seal
springs
support
support layer
supported
surfaces
transducer
trapping
typically
upper
volume