Micro-machined resonator

Patent · Fri Jan 01 00:00:00 EST 1993

OSTI ID:868721

Godshall, Ned A ^[1]; Koehler, Dale R ^[1]; Liang, Alan Y ^[1]; Smith, Bradley K ^[1]

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1. Albuquerque, NM

A micro-machined resonator, typically quartz, with upper and lower micro-machinable support members, or covers, having etched wells which may be lined with conductive electrode material, between the support members is a quartz resonator having an energy trapping quartz mesa capacitively coupled to the electrode through a diaphragm; the quartz resonator is supported by either micro-machined cantilever springs or by thin layers extending over the surfaces of the support. If the diaphragm is rigid, clock applications are available, and if the diaphragm is resilient, then transducer applications can be achieved. Either the thin support layers or the conductive electrode material can be integral with the diaphragm. In any event, the covers are bonded to form a hermetic seal and the interior volume may be filled with a gas or may be evacuated. In addition, one or both of the covers may include oscillator and interface circuitry for the resonator.

• Research Organization: AT&T
• DOE Contract Number: AC04-76DP00789
• Assignee: United States of America as represented by United States (Washington, DC)
• Patent Number(s): US 5198716
• OSTI ID: 868721
• Country of Publication: United States
• Language: English

Related Subjects

micro-machined
resonator
typically
quartz
upper
micro-machinable
support
covers
etched
lined
conductive
electrode
material
energy
trapping
mesa
capacitively
coupled
diaphragm
supported
cantilever
springs
layers
extending
surfaces
rigid
clock
applications
available
resilient
transducer
achieved
integral
event
bonded
form
hermetic
seal
interior
volume
filled
gas
evacuated
addition
oscillator
interface
circuitry
capacitively coupled
quartz resonator
electrode material
support layer
hermetic seal
micro-machined resonator
conductive electrode
cantilever spring
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