Micro-machined resonator oscillator

Patent · Fri Dec 31 23:00:00 EST 1993

OSTI ID:869452

Koehler, Dale R ^[1]; Sniegowski, Jeffry J ^[1]; Bivens, Hugh M ^[1]; Wessendorf, Kurt O ^[1]

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1. Albuquerque, NM

A micro-miniature resonator-oscillator is disclosed. Due to the miniaturization of the resonator-oscillator, oscillation frequencies of one MHz and higher are utilized. A thickness-mode quartz resonator housed in a micro-machined silicon package and operated as a "telemetered sensor beacon" that is, a digital, self-powered, remote, parameter measuring-transmitter in the FM-band. The resonator design uses trapped energy principles and temperature dependence methodology through crystal orientation control, with operation in the 20-100 MHz range. High volume batch-processing manufacturing is utilized, with package and resonator assembly at the wafer level. Unique design features include squeeze-film damping for robust vibration and shock performance, capacitive coupling through micro-machined diaphragms allowing resonator excitation at the package exterior, circuit integration and extremely small (0.1 in. square) dimensioning. A family of micro-miniature sensor beacons is also disclosed with widespread applications as bio-medical sensors, vehicle status monitors and high-volume animal identification and health sensors. The sensor family allows measurement of temperatures, chemicals, acceleration and pressure. A microphone and clock realization is also available.

• Research Organization: AT & T CORP
• DOE Contract Number: AC04-76DP00789
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): US 5339051
• OSTI ID: 869452
• Country of Publication: United States
• Language: English

Related Subjects

/331/310/324/343/455/
20-100
acceleration
allowing
allows
allows measurement
animal
applications
assembly
available
batch-processing
beacon
beacons
bio-medical
capacitive
capacitive coupling
chemicals
circuit
clock
control
coupling
crystal
crystal orientation
damping
dependence
design
design features
diaphragms
digital
dimensioning
disclosed
due
energy
excitation
exterior
extremely
family
features
fm-band
frequencies
health
high-volume
housed
hz range
identification
integration
level
manufacturing
measurement
measuring-transmitter
medical sensor
methodology
mhz
micro-machined
micro-machined resonator
micro-miniature
microphone
miniaturization
monitors
operated
operation
orientation
oscillation
oscillator
package
parameter
performance
pressure
principles
quartz
quartz resonator
range
realization
remote
resonator
resonator assembly
resonator-oscillator
robust
self-powered
sensor
sensors
shock
silicon
square
squeeze-film
status
telemetered
temperature
temperature dependence
temperatures
thickness-mode
trapped
unique
utilized
vehicle
vibration
volume
wafer
widespread