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Title: Micro-machined resonator oscillator

Abstract

A micro-miniature resonator-oscillator is disclosed. Due to the miniaturization of the resonator-oscillator, oscillation frequencies of one MHz and higher are utilized. A thickness-mode quartz resonator housed in a micro-machined silicon package and operated as a "telemetered sensor beacon" that is, a digital, self-powered, remote, parameter measuring-transmitter in the FM-band. The resonator design uses trapped energy principles and temperature dependence methodology through crystal orientation control, with operation in the 20-100 MHz range. High volume batch-processing manufacturing is utilized, with package and resonator assembly at the wafer level. Unique design features include squeeze-film damping for robust vibration and shock performance, capacitive coupling through micro-machined diaphragms allowing resonator excitation at the package exterior, circuit integration and extremely small (0.1 in. square) dimensioning. A family of micro-miniature sensor beacons is also disclosed with widespread applications as bio-medical sensors, vehicle status monitors and high-volume animal identification and health sensors. The sensor family allows measurement of temperatures, chemicals, acceleration and pressure. A microphone and clock realization is also available.

Inventors:
 [1];  [1];  [1];  [1]
  1. (Albuquerque, NM)
Publication Date:
Research Org.:
AT & T CORP
OSTI Identifier:
869452
Patent Number(s):
US 5339051
Assignee:
Sandia Corporation (Albuquerque, NM) SNL
DOE Contract Number:  
AC04-76DP00789
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
micro-machined; resonator; oscillator; micro-miniature; resonator-oscillator; disclosed; due; miniaturization; oscillation; frequencies; mhz; utilized; thickness-mode; quartz; housed; silicon; package; operated; telemetered; sensor; beacon; digital; self-powered; remote; parameter; measuring-transmitter; fm-band; design; trapped; energy; principles; temperature; dependence; methodology; crystal; orientation; control; operation; 20-100; range; volume; batch-processing; manufacturing; assembly; wafer; level; unique; features; squeeze-film; damping; robust; vibration; shock; performance; capacitive; coupling; diaphragms; allowing; excitation; exterior; circuit; integration; extremely; square; dimensioning; family; beacons; widespread; applications; bio-medical; sensors; vehicle; status; monitors; high-volume; animal; identification; health; allows; measurement; temperatures; chemicals; acceleration; pressure; microphone; clock; realization; available; quartz resonator; resonator assembly; temperature dependence; micro-machined resonator; crystal orientation; design features; hz range; allows measurement; medical sensor; capacitive coupling; /331/310/324/343/455/

Citation Formats

Koehler, Dale R., Sniegowski, Jeffry J., Bivens, Hugh M., and Wessendorf, Kurt O. Micro-machined resonator oscillator. United States: N. p., 1994. Web.
Koehler, Dale R., Sniegowski, Jeffry J., Bivens, Hugh M., & Wessendorf, Kurt O. Micro-machined resonator oscillator. United States.
Koehler, Dale R., Sniegowski, Jeffry J., Bivens, Hugh M., and Wessendorf, Kurt O. Sat . "Micro-machined resonator oscillator". United States. https://www.osti.gov/servlets/purl/869452.
@article{osti_869452,
title = {Micro-machined resonator oscillator},
author = {Koehler, Dale R. and Sniegowski, Jeffry J. and Bivens, Hugh M. and Wessendorf, Kurt O.},
abstractNote = {A micro-miniature resonator-oscillator is disclosed. Due to the miniaturization of the resonator-oscillator, oscillation frequencies of one MHz and higher are utilized. A thickness-mode quartz resonator housed in a micro-machined silicon package and operated as a "telemetered sensor beacon" that is, a digital, self-powered, remote, parameter measuring-transmitter in the FM-band. The resonator design uses trapped energy principles and temperature dependence methodology through crystal orientation control, with operation in the 20-100 MHz range. High volume batch-processing manufacturing is utilized, with package and resonator assembly at the wafer level. Unique design features include squeeze-film damping for robust vibration and shock performance, capacitive coupling through micro-machined diaphragms allowing resonator excitation at the package exterior, circuit integration and extremely small (0.1 in. square) dimensioning. A family of micro-miniature sensor beacons is also disclosed with widespread applications as bio-medical sensors, vehicle status monitors and high-volume animal identification and health sensors. The sensor family allows measurement of temperatures, chemicals, acceleration and pressure. A microphone and clock realization is also available.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sat Jan 01 00:00:00 EST 1994},
month = {Sat Jan 01 00:00:00 EST 1994}
}

Patent:

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