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Title: Micro-machined resonator oscillator

Abstract

A micro-miniature resonator-oscillator is disclosed. Due to the miniaturization of the resonator-oscillator, oscillation frequencies of one MHz and higher are utilized. A thickness-mode quartz resonator housed in a micro-machined silicon package and operated as a telemetered sensor beacon'' that is, a digital, self-powered, remote, parameter measuring-transmitter in the FM-band. The resonator design uses trapped energy principles and temperature dependence methodology through crystal orientation control, with operation in the 20--100 MHz range. High volume batch-processing manufacturing is utilized, with package and resonator assembly at the wafer level. Unique design features include squeeze-film damping for robust vibration and shock performance, capacitive coupling through micro-machined diaphragms allowing resonator excitation at the package exterior, circuit integration and extremely small (0.1 in. square) dimensioning. A family of micro-miniature sensor beacons is also disclosed with widespread applications as bio-medical sensors, vehicle status monitors and high-volume animal identification and health sensors. The sensor family allows measurement of temperatures, chemicals, acceleration and pressure. A microphone and clock realization is also available. 21 figs.

Inventors:
; ; ;
Publication Date:
OSTI Identifier:
6979186
Patent Number(s):
US 5339051; A
Application Number:
PPN: US 8-039638
Assignee:
Sandia Corp., Albuquerque, NM (United States) SNL; EDB-94-132707
DOE Contract Number:  
AC04-76DP00789
Resource Type:
Patent
Resource Relation:
Patent File Date: 30 Mar 1993
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; 47 OTHER INSTRUMENTATION; OSCILLATORS; DESIGN; USES; MINIATURIZATION; PRESSURE MEASUREMENT; RESONATORS; TEMPERATURE MEASUREMENT; ELECTRONIC EQUIPMENT; EQUIPMENT; 426000* - Engineering- Components, Electron Devices & Circuits- (1990-); 440000 - Instrumentation

Citation Formats

Koehler, D.R., Sniegowski, J.J., Bivens, H.M., and Wessendorf, K.O. Micro-machined resonator oscillator. United States: N. p., 1994. Web.
Koehler, D.R., Sniegowski, J.J., Bivens, H.M., & Wessendorf, K.O. Micro-machined resonator oscillator. United States.
Koehler, D.R., Sniegowski, J.J., Bivens, H.M., and Wessendorf, K.O. Tue . "Micro-machined resonator oscillator". United States.
@article{osti_6979186,
title = {Micro-machined resonator oscillator},
author = {Koehler, D.R. and Sniegowski, J.J. and Bivens, H.M. and Wessendorf, K.O.},
abstractNote = {A micro-miniature resonator-oscillator is disclosed. Due to the miniaturization of the resonator-oscillator, oscillation frequencies of one MHz and higher are utilized. A thickness-mode quartz resonator housed in a micro-machined silicon package and operated as a telemetered sensor beacon'' that is, a digital, self-powered, remote, parameter measuring-transmitter in the FM-band. The resonator design uses trapped energy principles and temperature dependence methodology through crystal orientation control, with operation in the 20--100 MHz range. High volume batch-processing manufacturing is utilized, with package and resonator assembly at the wafer level. Unique design features include squeeze-film damping for robust vibration and shock performance, capacitive coupling through micro-machined diaphragms allowing resonator excitation at the package exterior, circuit integration and extremely small (0.1 in. square) dimensioning. A family of micro-miniature sensor beacons is also disclosed with widespread applications as bio-medical sensors, vehicle status monitors and high-volume animal identification and health sensors. The sensor family allows measurement of temperatures, chemicals, acceleration and pressure. A microphone and clock realization is also available. 21 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Aug 16 00:00:00 EDT 1994},
month = {Tue Aug 16 00:00:00 EDT 1994}
}