Optical and mechanical properties of dc sputtered carbon films

Journal Article · Thu Nov 01 04:00:00 EST 1990 · Journal of Materials Research; (USA)

DOI:https://doi.org/10.1557/JMR.1990.2538· OSTI ID:6180933

Rubin, M; Hopper, C B; Cho, N ^[1]; Bhushan, B ^[2]

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1. Lawrence Berkeley Laboratory, University of California, Berkeley, CA (USA)
2. IBM Research Division, IBM Almaden Research Center, San Jose, CA (USA)

Amorphous carbon films were deposited on glass by dc magnetron sputtering from a graphite target in mixtures of argon and hydrogen. Hydrogen flow and other deposition parameters affected the optical and mechanical properties of these films. Increasing hydrogen content caused the average visible transmittance to vary from 16% to 86% for 500-A thick films. Maximum compressive stress and hardness occur between 0--1% hydrogen flow, resulting in rapid delamination. Low sputtering power moderately increases transmittance and hardness while relieving stress. Transparency is induced in both the high-hydrogen and low-power films by formation of sp{sup 3} C-C bonds. In the case of the hydrogenated films, however, a softer polymeric structure is formed.

• DOE Contract Number: AC03-76SF00098
• OSTI ID: 6180933
• Journal Information: Journal of Materials Research; (USA), Journal Name: Journal of Materials Research; (USA) Vol. 5:11; ISSN JMREE; ISSN 0884-2914
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360601* -- Other Materials-- Preparation & Manufacture
360603 -- Materials-- Properties
AMORPHOUS STATE
CARBON
DEPOSITION
ELECTRON TUBES
ELECTRONIC EQUIPMENT
ELEMENTAL MINERALS
ELEMENTS
EQUIPMENT
FILMS
GRAPHITE
HARDNESS
HYDROGEN
HYDROGEN ADDITIONS
MAGNETRONS
MECHANICAL PROPERTIES
MICROWAVE EQUIPMENT
MICROWAVE TUBES
MINERALS
NONMETALS
OPACITY
OPTICAL PROPERTIES
PHYSICAL PROPERTIES
POLYMERS
QUANTITY RATIO
SPUTTERING
STRESSES
TARGETS
THIN FILMS