Low-temperature chemical-vapor deposition of tungsten from tungsten hexacarbonyl

Conference · Thu Jan 01 00:00:00 EST 1981

DOI:https://doi.org/10.1116/1.571599· OSTI ID:6156111

Vogt, G J

Chemical vapor deposition (CVD) of tungsten from W(CO)/sub 6/ has been investigated below 670/sup 0/K as an alternate process to WF/sub 6/ CVD for coating glass microspheres. The major advantages of W(CO)/sub 6/ CVD are the elimination of the HF damage to the glass microspheres and potentially a lower deposition temperature for coating DT-filled microspheres. W(CO)/sub 6/ CVD can be utilized, in principle, to coat the microspheres with 1 to 5 ..mu..m of tungsten or to flash coat the microspheres for further coating by WF/sub 6/ CVD. Test coatings were deposited in a fluidized-bed reactor with a hydrogen carrier gas. The coatings were found to contain nearly-equal portions of carbon and oxygen, ranging from 16 to 25 at. % for each element. The high carbon and oxygen concentrations are believed to result principally from the physical entrapment of chemisorbed CO molecules at the surface of the growing deposit.

• Research Organization: Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
• DOE Contract Number: W-7405-ENG-36
• OSTI ID: 6156111
• Report Number(s): LA-UR-81-2681; CONF-811113-19; ON: DE82000583
• Resource Relation: Journal Volume: 20; Journal Issue: 4; Conference: American Vacuum Society national symposium, Anaheim, CA, USA, 3 Nov 1981
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
THERMONUCLEAR FUELS
COATINGS
TUNGSTEN
CARBON COMPOUNDS
CHEMICAL VAPOR DEPOSITION
DEUTERIUM TRITIDES
GLASS
MICROSPHERES
TUNGSTEN COMPOUNDS
CHEMICAL COATING
DEPOSITION
DEUTERIUM COMPOUNDS
ELEMENTS
FUELS
HYDROGEN COMPOUNDS
LABELLED COMPOUNDS
METALS
REFRACTORY METALS
SURFACE COATING
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
TRITIUM COMPOUNDS
060201* - Fusion Fuels- Fabrication & Testing- (1980-1987)