Preparation of amorphous electrochromic tungsten oxide and molybdenum oxide by plasma enhanced chemical vapor deposition
Preliminary experiments have been performed to probe the feasibility of using plasma enhanced chemical vapor deposition (PE--CVD) to prepare electrochromic thin films of tungsten oxide and molybdenum oxide by plasma reaction of WF/sub 6/, W(CO)/sub 6/, and Mo(CO)/sub 6/ with oxygen. Thin films produced in a 300 W, electrodeless, radio-frequency (rf), capacitive discharge were found to be electrochromic when tested with either liquid or solid electrolytes. Optical spectroscopy was performed on two electrochromic coatings after Li/sup +/ ion insertion from a propylene carbonate liquid electrolyte. Broad absorption peaks at --900 nm for WO/sub 3/ and 600 nm for MoO/sub 3/ were observed. Optical results for PE--CVD MoO/sub 3/ films differ from those reported for evaporated MoO/sub 3/ films which have an absorption peak at --800 nm. The shorter wavelength absorption in the PE--CVD MoO/sub 3/ films offers the potential for fabricating electrochromic devices with higher contrast ratios and less color change. Optical emission spectroscopy, Auger, and x-ray diffraction analyses indicate these thin film deposits to be predominantly amorphous tungsten and molybdenum oxides.
- Research Organization:
- Materials Research Branch, Solar Energy Research Institute, Golden, Colorado 80401
- DOE Contract Number:
- AC02-83CH10093
- OSTI ID:
- 5112522
- Journal Information:
- J. Vac. Sci. Technol., A; (United States), Vol. 4:5
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
MOLYBDENUM OXIDES
AMORPHOUS STATE
CHEMICAL VAPOR DEPOSITION
ELECTROCHROMISM
TUNGSTEN OXIDES
AUGER ELECTRON SPECTROSCOPY
CRYSTAL STRUCTURE
EMISSION SPECTROSCOPY
FABRICATION
THIN FILMS
VISIBLE SPECTRA
X-RAY DIFFRACTION
CHALCOGENIDES
CHEMICAL COATING
COHERENT SCATTERING
DEPOSITION
DIFFRACTION
ELECTRO-OPTICAL EFFECTS
ELECTRON SPECTROSCOPY
FILMS
MOLYBDENUM COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
REFRACTORY METAL COMPOUNDS
SCATTERING
SPECTRA
SPECTROSCOPY
SURFACE COATING
TRANSITION ELEMENT COMPOUNDS
TUNGSTEN COMPOUNDS
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication