Studies of polycrystalline WO{sub 3} and MoO{sub 3} coatings prepared by chemical vapor deposition
- Univ. des Sciences et Techniques du Languedoc, Montpellier (France)
During the past decade a great interest has been shown in the study of transition metal trioxide (WO{sub 3} and MoO{sub 3}) thin films. The reason is that these transition metal oxides present a number of interesting optical and electrical properties. Among these properties the electrochromic effect in the films is of particular interest. By the use of this phenomenon it is possible to alter the transmission and reflection properties of glasses to regulate the radiated energy throughout (smart windows). Another possible application of this effect is in display. Until now, various methods (thermal or electron beam evaporation, RF sputtering, spray, anodic oxidation, sol-gel, hydrothermal treatment) have been used to prepare amorphous and polycrystalline WO{sub 3} or MoO{sub 3} thin films. Presented in this paper is the experimental procedure to prepare polycrystalline WO{sub 3} or MoO{sub 3} coatings by annealing at various temperatures and in various annealing environments of black tungsten, black molybdenum, reflective tungsten, or reflective molybdenum thin films deposited by chemical vapor deposition (CVD) from metal hexacarbonyl W(CO){sub 6} or Mo(CO){sub 6}. The structural, optical, and electrochromic properties of the different types of thin films obtained are developed. 68 refs., 15 figs., 6 tabs.
- OSTI ID:
- 86080
- Report Number(s):
- CONF-8809123--; ISBN 0-8194-0069-6
- Country of Publication:
- United States
- Language:
- English
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