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Studies of chemical vapor deposition of amorphous silicon and transparent electrodes for solar cells. I. Technical status report, 1 October 1983-31 December 1983

Technical Report ·
OSTI ID:6133365
This paper is the first in a series reporting research on chemical vapor deposition (CVD) of amorphous silicon and transparent electrodes for solar cells. Films of a-SiH were deposited by CVD from a mixture of higher silanes and hydrogen at atmospheric pressure on various substrates. Roughening of a crystalline silicon substrate produced somewhat better adhesion than previously obtained. Optical absorption characteristics of the films were measured. A surface photovoltage (SPV) measurement apparatus was developed and is described.
Research Organization:
Harvard Univ., Cambridge, MA (USA)
DOE Contract Number:
AC02-83CH10093
OSTI ID:
6133365
Report Number(s):
SERI/STR-211-2447; ON: DE85002903
Country of Publication:
United States
Language:
English