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U.S. Department of Energy
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Studies of chemical vapor deposition of amorphous silicon and transparent electrodes for Solar Cells III. Status report, 1 April-30 June 1984

Technical Report ·
OSTI ID:6415812
This is the third progress report on research studies of chemical vapor deposition (CVD) of amorphous silicon and transparent electrodes for solar cells. An apparatus for measuring minority carrier diffusion lengths, a surface photovoltage system, was calibrated and found to obtain reproducible results. Surface photovoltages of several samples of CVD a-Si were measured, and diffusion lengths ranged from 0.1 to 0.4 micron. The highest diffusion length values were found in samples grown in the early part of the gas flow, implying that either a higher quality film is formed from SiH/sub 2/ precursors than from others or that a small amount of boron doping early in the process produces a better film.
Research Organization:
Harvard Univ., Cambridge, MA (USA). Dept. of Chemistry
DOE Contract Number:
AC02-83CH10093
OSTI ID:
6415812
Report Number(s):
SERI/STR-211-2513; ON: DE85000523
Country of Publication:
United States
Language:
English